Fast Stokes Solvers for MEMS

  • Attilio Frangi
Part of the Lecture Notes in Applied and Computational Mechanics book series (LNACM, volume 63)


Providing an estimate of gas damping in MEMS is a complex task since MEMS are fully three dimensional micro-structures which cannot in general be reduced to simple 1D or 2D models and since the gas cannot be treated as a continuum medium at the microscale. This issue is here addressed, focusing on high pressure applications, by means of integral equations and fast solvers implementing a linear incompressible Stokes formulation with slip boundary conditions. Numerical results are validated with experimental data. Extensions to high working frequencies and low pressures are discussed.


Boundary Element Method Multipole Expansion Boundary Integral Equation Method Fast Multipole Method Fast Solver 
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Copyright information

© Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  1. 1.Politecnico di MilanoMilanoItaly

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