Abstract
Nanoscale science and technology demands novel approaches and new knowledge for further development. Nanofabrication has been widely employed in modern science and engineering. Probe-based nanolithography is a common technique to manufacture nanostructures. This research contributes fundamental understanding in surface science through development of a new methodology. A delicate hardware system was designed and constructed to realize the nanometer-scale direct writing. A simple and unique process, namely, laser-assisted scanning probe alloying nanolithography (LASPAN), to fabricate well-defined nanostructures has been developed. The LASPAN system, process, and the application in gold-silicon (Au-Si) binary system have been discussed in this chapter.
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Notes
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∗ Currently at Applied Optoelectronics, Inc.
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† Currently at Harvard University
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Acknowledgements
This work was sponsored by the National Science Foundation (grant number 0506082).
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Peng, L., Zhang, H., Hemmer, P., Liang, H. (2012). Laser-Assisted Scanning Probe Alloying Nanolithography (LASPAN). In: Bhushan, B. (eds) Scanning Probe Microscopy in Nanoscience and Nanotechnology 3. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-25414-7_1
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