Mechatronics pp 777-784 | Cite as

Low Coherence Interferometric System for MEMS/MOEMS Testing

  • A. Pakula
  • L. Salbut
Conference paper


Low Coherence Interferometry (LCI) known also as White Light Interferometry (WLI) is a useful tool for vast range of specimen characterization especially for MEMS/MOEMS testing [1,2]. In the paper specially design laboratory interferometric setup, together with examples of various objects characterized by it, is presented.


Light Emit Diode Reference Surface Optical Setup Fiber Protrusion Order Fringe 
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Copyright information

© Springer-Verlag Berlin Heidelberg 2011

Authors and Affiliations

  • A. Pakula
    • 1
  • L. Salbut
    • 1
  1. 1.Institute of Micromechanics and PhotonicsWarsaw University of TechnologyWarsawPoland

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