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Mechatronics pp 777-784 | Cite as

Low Coherence Interferometric System for MEMS/MOEMS Testing

  • A. Pakula
  • L. Salbut
Conference paper

Abstract

Low Coherence Interferometry (LCI) known also as White Light Interferometry (WLI) is a useful tool for vast range of specimen characterization especially for MEMS/MOEMS testing [1,2]. In the paper specially design laboratory interferometric setup, together with examples of various objects characterized by it, is presented.

Keywords

Light Emit Diode Reference Surface Optical Setup Fiber Protrusion Order Fringe 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2011

Authors and Affiliations

  • A. Pakula
    • 1
  • L. Salbut
    • 1
  1. 1.Institute of Micromechanics and PhotonicsWarsaw University of TechnologyWarsawPoland

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