Mechatronics pp 227-235 | Cite as

Procedure for Calibrating Kelvin Probe Force Microscope

  • M. Ligowski
  • Ryszard Jabłoński
  • M. Tabe
Conference paper


The paper presents novel method for calibrating Kelvin Probe Force Microscope. The method is based on measuring the surface potential of a reference sample and comparing it with the results obtained by KFM. Proposed method offers a calibration possibility in the whole measuring range of the microscope both in terms of absolute values and dynamic behavior. In this novel method the surface potential of a reference sample used for calibration can be adjusted to desired value instead of being defined by physical parameters of the sample. Presented results obtained with proposed method prove its validity.


Reference Sample Surface Potential Voltage Generator Versus Shift Probe Force Microscope 
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Copyright information

© Springer-Verlag Berlin Heidelberg 2011

Authors and Affiliations

  • M. Ligowski
    • 1
    • 2
  • Ryszard Jabłoński
    • 1
  • M. Tabe
    • 2
  1. 1.Faculty of MechatronicsWarsaw University of TechnologyWarsawPoland
  2. 2.Research Institute of ElectronicsShizuoka UniversityHamamatsuJapan

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