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Advanced Functional Materials pp 157–194Cite as

Chemical and Biological Sensors Based on Porous Silicon Nanomaterials

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Abstract

The porous silicon (PSi) material, an electrochemical derivative of silicon, is a natural nano-structured material that can be prepared easily without much sophistication. The history of PSi research is quite remarkable. This material was accidentally discovered by Ulhir at Bell Labs, USA, in 1956[1], followed by Turner[2] during a study on the electropolishing of silicon in hydrofluoric acid solution. After the discovery, only a small amount of interest in the field developed as a result of the poor understanding of the porous structure. In the 1970’s, it was found that by thermal oxidation the porous structure could be easily transformed into silicon dioxide and used as an isolation dielectric material. [3,4] Further advances in electronic isolation technology by Japanese groups in the 1980’s led to the development of full isolated porous oxidized silicon (FIPOS)[5] and the silicon-on-insulator (SOI)[6] process.

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References

  1. Uhlir, A. Bell Synt. Tech. J., 1956, 35: 333.

    CAS  Google Scholar 

  2. Turner, D. R. J. Electrochem. Soc., 1958, 105: 402.

    CAS  Google Scholar 

  3. Arita, Y., Kato, K., Sudo, T. IEEE T. Electron Dev., 1977, 24: 757.

    Google Scholar 

  4. Unagami, T., Kato, K. Jpn. J. Appl. Phys., 1977, 16: 1635.

    CAS  Google Scholar 

  5. Imai, K. Solid State Electron, 1981, 24: 159.

    CAS  Google Scholar 

  6. Otoi, F., Anzai, K., Kitabayashi, H., Uchiho, K., Mizokami, Y. J. Electrochem. Soc., 1984, 131: C319.

    Google Scholar 

  7. Canham, L. T. Appl. Phys. Lett., 1990, 57: 1046.

    CAS  Google Scholar 

  8. Cullis, A. G., Canham, L. T. Nature, 1991, 353: 335.

    CAS  Google Scholar 

  9. Sui, Z., Leong, P. P., Herman, I. P., Higashi, G. S., Temkin, H. Appl. Phys. Lett., 1992, 60: 2086.

    CAS  Google Scholar 

  10. Delerue, C., Allan, G., Lannoo, M. Phys. Rev. B, 1993, 48: 11024.

    CAS  Google Scholar 

  11. Koch, F., Petrova-Koch, M., V. T., Nikolov, A., Gavrilenko, V. Mater. Res. Soc. Symp. Proc., 1993, 298: 319.

    CAS  Google Scholar 

  12. Lee, E. J., Bitner, T. W., Ha, J. S., Shane, M. J., Sailor, M. J. J. Am. Chem. Soc., 1996, 118: 5375.

    CAS  Google Scholar 

  13. Buriak, J. M., Allen, M. J. J. Am. Chem. Soc., 1998, 120: 1339.

    CAS  Google Scholar 

  14. Richter, A., Steiner, P., Kozlowski, F., Lang, W. IEEE Electron Device Lett., 1991, 12: 691.

    CAS  Google Scholar 

  15. Hirschmann, K., Tsybeskov, D. L., Duttagupta, S. P., Fauchet, P. M. Nature, 1996, 384: 338.

    Google Scholar 

  16. Mazzoleni, C. Pavesi, L. Appl. Phys. Lett., 1995, 67: 2983.

    CAS  Google Scholar 

  17. Smestad, G., Kunst, M., Vial, C. Sol. Energy Mater. Sol. Cells, 1992, 26: 277.

    CAS  Google Scholar 

  18. Lauerhaas, J. M., Sailor, M. J. Science, 1993, 261: 1567.

    CAS  Google Scholar 

  19. Sohn, H., Letant, S., Sailor, M. J., Trogler, W. C. J. Am. Chem. Soc., 2000, 122: 5399.

    CAS  Google Scholar 

  20. Letant, S., Sailor, M. J. Adv. Mater., 2001, 13: 355.

    Google Scholar 

  21. Chan, S., Horner, S. R., Fauchet, P. M., Miller, B. L. J. Am. Chem. Soc., 2001, 123: 11797.

    CAS  Google Scholar 

  22. Sohn, H., Calhoun, R. M., Sailor, M. J., Trogler, W. C. Angew. Chem. Int. Ed., 2001, 40: 2104.

    CAS  Google Scholar 

  23. Sohn, H., Sailor, M. J., Magde, J. D., Trogler, W. C. J. Am. Chem. Soc., 2003, 125: 3821.

    CAS  Google Scholar 

  24. Li, X., Coffer, J. L., Chen, Y. D., Pinizzotto, N. R. F. J., Canham, L. T. J. Am. Chem. Soc., 1998, 120: 11706.

    CAS  Google Scholar 

  25. Koshida, N., Nakajima, T., Yoshiyama, M., Ueno, K., Nakagawa, T., Shinoda, H. Mater. Res. Soc. Symp. Proc., 1999, 536: 105.

    CAS  Google Scholar 

  26. Bell, T. E., Gennissen, P. T. J., Demunter, D., Kuhl, M. J. Micromech. Microeng., 1996, 6: 361.

    CAS  Google Scholar 

  27. Zubko, V. G., Smith, T. L., Witt, A. N. Astrophys. J., 1998, p 501.

    Google Scholar 

  28. Parkhutik, V. P., Matveeva, E., Perez, R., Alamo, J., BeltraÂn, D. Mater. Sci. Engn. B, 2000, pp 69–70, 53.

    Google Scholar 

  29. Bondarenko, V. P., Bogatirev, Y. V., Colinge, J. P., Dolgyi, L. N., Dorofeev, A. M., Yakovtseva, V. A. IEEE. Trans. Nucl. Sci., 1997, 44: 1719.

    CAS  Google Scholar 

  30. Parkhutik, V. P., Canham, L. T. Phys. Stat. Sol. A, 2000, 182: 591.

    CAS  Google Scholar 

  31. Lehmann, V., Gösele, U. Appl. Phys. Lett., 1991, 58: 856.

    CAS  Google Scholar 

  32. Sailor, M. J., Heinrich, J. L., Lauerhaas, J. M. Stud. Surface Sci. Cat., 1996, 103: 209.

    Google Scholar 

  33. Smith, R. L., Collins, S. D. J. Appl. Phys., 1992, 71: R1.

    CAS  Google Scholar 

  34. Hossain, S. M., Das, J., Chakraborty, S., Dutta, S. K., Saha, H. Semicon. Sci. Tech., 2002, 17: 55.

    CAS  Google Scholar 

  35. Itotia, I. K., Drayton, R. F. IEEE Antenn. Propag. Soc., 2003, 2: 663.

    Google Scholar 

  36. Halimaoui, A. Porous Silicon Science and Technology, Vial, J. C., Derrien, J., Eds. Springer-Verlag, New York, 1995, p 33.

    Google Scholar 

  37. Christopersen, M., Carstensen, J., Foll, H. Phys. Stat. Sol. A, 2000, 182: 601.

    Google Scholar 

  38. Chuang, S. F., Collins, S. D., Smith, R. L. Appl. Phys. Lett., 1989, 55: 675.

    CAS  Google Scholar 

  39. Brumhead, D., Canham, L. T., Seekings, D. M., Tufton, P. J. Electrochi. Acta, 1993, 38: 191.

    CAS  Google Scholar 

  40. Bergman, D. J. Phys. Rep. C, 1978, 43: 377.

    Google Scholar 

  41. Looyenga, H. Physica, 1965, 31: 401.

    CAS  Google Scholar 

  42. Brunauer, S., Emmett, P. H., Teller, E. J. Am. Chem. Soc., 1938, 60: 309.

    CAS  Google Scholar 

  43. Sawada, S., Hamada, N., Ookubo, N. Phys. Rev. B, 1994, 49: 5236.

    CAS  Google Scholar 

  44. Read, A. J., Needs, R. J., Nash, K. J., Canham, L. T., Calcott, P. D. J., Qteish, A. Phys. Rev. Lett., 1992, 69: 1232.

    CAS  Google Scholar 

  45. Kanemitsu, Y., Uto, H., Masumoto, Y., Futagi, T., Mimura, H. Phys. Rev. B, 1993, 48: 2827.

    CAS  Google Scholar 

  46. Hory, M., Herino, A. R., Ligeon, M., Muller, F., Gaspard, F., Mihalcescu, I., Vial, J. C. Thin Solid Films, 1995, 255: 200.

    CAS  Google Scholar 

  47. Nakahima, A., Itakura, T., Watanabe, S., Nakayama, N. Appl. Phys. Lett., 1992, 64: 46.

    Google Scholar 

  48. Yan, J., Shih, S., Jung, K. H., Kwong, D. L., Kovar, M., White, J. M., Gnade, B. E., Magel, L. Appl. Phys. Lett., 1994, 64: 1374.

    CAS  Google Scholar 

  49. Walter, L., Peter, S., Frank, K., Peter, R. Thin Solid Films, 1995, 255: 224.

    Google Scholar 

  50. Hirschmann, K. D., Tsybeskov, L., Duttagupta, S. P., Fauchet, P. M. Nature, 1996, 384: 338.

    Google Scholar 

  51. Pap, A. E., Kordás, K., George, T. F., Leppävuori, S. J. Phys. Chem. B, 2004, 108: 12744.

    CAS  Google Scholar 

  52. Kim, S. G., Kim, S., Ko, Y. C., Cho, S., Sohn, H. Colloids Surf. A, 2008, pp 313–314, 398

    Google Scholar 

  53. Higashi, G. S., Chabal, Y. J., Trucks, G. W., Raghavachari, K. Appl. Phys. Lett., 1990, 56: 656.

    CAS  Google Scholar 

  54. Higashi, G. S., Becker, R. S., Chabal, R. S., Becker, A. J. Appl. Phys. Lett., 1991, 58: 1656.

    CAS  Google Scholar 

  55. Bateman, J. E., Eagling, R. D., Worrall, D. R., Horrocks, B. R., Houlton, A. Angew. Chem. Int. Ed. Engl., 1998, 37: 2683.

    CAS  Google Scholar 

  56. Boukherroub, R., Morin, S., Wayner, D. D. M., Bensebaa, F., Sproule, G. I. Baribeau, J. M., Lockwood, D. J. Chem. Mater., 2001, 13: 2002.

    CAS  Google Scholar 

  57. Bateman, J. E., Eagling, R. D., Horrocks, B. R., Houlton, A. J. Phys. Chem. B, 2000, 104: 5557.

    CAS  Google Scholar 

  58. Fleming, I. In: Comprehensive Organic Chemistry, Jones, N., Ed., Pergamon: New York, 1979, 3: 568.

    Google Scholar 

  59. Buriak, J. M. Chem. Rev., 2002, 102: 1271.

    CAS  Google Scholar 

  60. Berger, M. G., Dieker, C., Thonisen, M., Vescan, L., Luth, H. Munder, H. J. Phys. D, 1994, 27: 1333.

    CAS  Google Scholar 

  61. Loni, A., Canham, L. T., Berger, M. G., Arens-Fisher, R., Munder, H., Luth, H., Arrand, H. F., Benson, T. M. Thin Solid Films, 1996, 276: 143.

    CAS  Google Scholar 

  62. Hruger, M., Berger, M. G., Marso, M., Reetz, W. T., Eickhoff, L, R., Vescan, L., Thonissen, M., Luth, H., Arens-Fisher, R., Hilbrich, S., Theiss, W. Jpn. J. Appl. Phys., 1997, 36: L24.

    Google Scholar 

  63. Pavesi, L. La Rivista del Nuovo Cimento, della Societá Italiana di Fisica, Frabetti, Marangon, S. P., Missiroil, M., Rucci, P, Bologna, Marangon, M., Eds., 1997, p 1.

    Google Scholar 

  64. Mazzoleni, C., Paves, L. Appl. Phys. Lett., 1995, 67: 2983.

    CAS  Google Scholar 

  65. Berger, M. G., Arens-Fischer, R., Thonisson, M., Kruger, M., Billat, S., Luth, H., Hilbrich, S., Theiss, W., Grosse, P. Thin Solid Films, 1997, 297: 237.

    CAS  Google Scholar 

  66. Cazzanelli, M., Vinegoni, C., Pavesi, L. J. Appl. Phys., 1999, 85: 1760.

    CAS  Google Scholar 

  67. Lehmann, V., Stengl, R., Reisinger, H., Detemple, R., Theiss, W. Appl. Phys. Lett., 2001, 78: 589.

    CAS  Google Scholar 

  68. Agrawal, V., Del Rio, J. A. Appl. Phys. Lett., 2003, 82: 1512.

    Google Scholar 

  69. Bovard, B. G. Appl. Opt., 1993, 32: 5427.

    CAS  Google Scholar 

  70. Nolte, A. J., Rubner, M. F., Cohen, R. E. Langmuir, 2004, 20: 3304.

    CAS  Google Scholar 

  71. Dorvee, J. R., Derfus, A. M., Bhatia, S. N., Sailor, M. J. Nat. Mater., 2004, 3: 896.

    CAS  Google Scholar 

  72. Ilyas, S., Böcking, T., Kilian, K., Reece, P. J., Gooding, J. K., Gaus, G. M. Opt. Mater., 2007, 29: 619.

    CAS  Google Scholar 

  73. Jang, S., Koh, Y., Kim, J., Sohn, H. J. Kor. Phys. Soc., 2008, 52: 212.

    CAS  Google Scholar 

  74. Jang, S., Koh, Y., Kim, J., Park, J., Park, C., Kim, S. J., Cho, S., Ko, Y. C., Sohn, H. Mater. Lett., 2008, 62: 552.

    CAS  Google Scholar 

  75. Park, J., Cho, S., Ko, Y. C., Sohn, H. J. Kor. Phys. Soc., 2007, 50: 695.

    CAS  Google Scholar 

  76. Office of the special assistant for Gulf War Illness, Department of Defense, Fact Sheet on Exposure Limits for Sarin (GB), 1997.

    Google Scholar 

  77. Nieuwenhuizen, M. S., Harteveld, J. L. N. Sens. Actuators B, 1997, 40: 167.

    Google Scholar 

  78. Williams, D., Pappas, G. Field Anal. Chem. Technol., 1999, 3: 45.

    CAS  Google Scholar 

  79. LeJeune, K. E., Wild, J. R., Russell, A. J. Nature, 1998, 395: 27.

    CAS  Google Scholar 

  80. Snow, E. S., Perkins, F. K., Houser, E. J., Badescu, S. C., Reinecke, T. L. Science, 2005, 307: 1942.

    CAS  Google Scholar 

  81. Taranenko, N., Alarie, J. P., Stokes, D. L., Vo-Dinh, T. J. Raman Spectrosc., 1996, 27: 379.

    CAS  Google Scholar 

  82. Hopkins, A. R., Lewis, N. S. Anal. Chem., 2001, 73: 884.

    CAS  Google Scholar 

  83. Letant, S. E., Kane, S. R., Hart, B. R., Hadi, M. Z., Cheng, T. C., Rastogi, V. K., Reynolds, J. G. Chem. Commun., 2005, p 851.

    Google Scholar 

  84. Dorvee, J., Sailor, M. J. Phys. Stat. Sol., 2005, 202: 1619.

    CAS  Google Scholar 

  85. Chan, S., Horner, S. R., Miller, B. L., Fauchet, P. M. J. Am. Chem. Soc., 2001, 123: 11797.

    CAS  Google Scholar 

  86. Pacholski, C., Yu, C., Miskelly, G. M., Godin, D., Sailor, M. J. J. Am. Chem. Soc., 2006, 128: 4250.

    CAS  Google Scholar 

  87. Snow, P. A., Squire, E. K., Russell, P. S. J., Canham, L. T. J. Appl. Phys., 1999, 86: 1781.

    CAS  Google Scholar 

  88. Pacholski, C., Sartor, M., Sailor, M. J., Cunnin, F., Miskelly, G. M. J. Am. Chem. Soc., 2005, 127: 11636.

    CAS  Google Scholar 

  89. Canham, L. T., Stewart, M. P., Buriak, J. M., Reeves, C. L., Anderson, M. E., Allcock, K. P., Snow, P. A. Phys. Status Solidi A, 2000, 182: 521.

    CAS  Google Scholar 

  90. Lehmann, V., Stengl, R., Reisinger, H., Detemple, R., Theiss, W. Appl. Phys. Lett., 2001, 78: 589.

    CAS  Google Scholar 

  91. Schmedake, T. A., Cunin, F., Link, J. R., Sailor, M. J. Adv. Mater., 2002, 14: 1270.

    CAS  Google Scholar 

  92. Cunin, F., Schmedake, T. A., Link, J. R., Li, Y. Y., Koh, J., Bhatia, S., Sailor, M. J. Nat. Mater., 2002, 1: 39.

    CAS  Google Scholar 

  93. Yoon, M. S., Ahn, K. H., Cheung, R. W., Sohn, H., Link, J. R., Cunin, F., Sailor, M. J. Chem. Commun., 2003, p 680.

    Google Scholar 

  94. Sailor, M. J., Link, J. R. Chem. Commun., 2005, p 1375.

    Google Scholar 

  95. Li, Y. Y., Cunin, F. J., Link, R., Gao, T., Betts, R. E., Reiver, S. H., Chin, V. S., Bhatia, N., Sailor, M. J. Science, 2003, 299: 2045.

    CAS  Google Scholar 

  96. Lee, B. J., Jang, S., Sohn, H. Solid State Phenom., 2007, pp 124–126, 491.

    Google Scholar 

  97. Janshoff, A., Dancil, K. P. S., Steinem, C. D., Greiner, P., Lin, V., Gurtner, S. Y., Motesharei, C. K., Sailor, M. J., Ghadiri, M. R. J. Am. Chem. Soc., 1998, 120: 12108.

    CAS  Google Scholar 

  98. Meade, S. O., Yoon, M. S., Ahn, K. H., Sailor, M. J. Adv. Mater., 2004, 16:1811.

    CAS  Google Scholar 

  99. Jang, S., Kim, J., Koh, Y., Ko, Y. C., Woo, H. G., Sohn, H. J. Nanosci. Nanotechnol., 2007, 7: 4049.

    CAS  Google Scholar 

  100. Koh, Y., Kim, S. J., Jang, S., Park, C., Sohn, H. J. Kor. Vac. Soc., 2007, 16: 99.

    Google Scholar 

  101. Lin, V. S.-Y., Motesharei, K., Dancil, K. P. S., Sailor, M. J., Ghadiri, M. R. Science, 1997, 278: 840.

    CAS  Google Scholar 

  102. Simion, M., Kleps, I., Neghina, T., Angelescu, A., Miu, M., Bragaru, A., Danila, M., Condac, E., Costache, M., Savu, L. J. Alloy. Compd., 2007, 434: 830.

    Google Scholar 

  103. Ilyas, S., Böcking, T., Kilian, K., Reece, P. J., Gooding, J., Gaus, K., Gal, M. Opt. Mater., 2007, 29: 619.

    CAS  Google Scholar 

  104. Khan, M. A., Haque, M. S., Naseem, H. A., Brown, W. D., Malshe, A. P. Thin Solid Films, 1998, 332: 93.

    CAS  Google Scholar 

  105. Létant, S. E., Content, S., Tan, T., Zenhausern, T. F., Sailor, M. J. Sensor Actuat. B-Chem., 2000, 69: 193.

    Google Scholar 

  106. Brecht, A., Gauglitz, G. Sensor. Actuat. B-Chem., 1997, 38: 1.

    Google Scholar 

  107. Janata, J., Josowicz, M., Devaney, D. M. Anal. Chem., 1994, 66: 207R.

    CAS  Google Scholar 

  108. Piechler, J., Brandenburg, I., Brecht, A. A., Wagner, E., Gauglitz, G. Appl. Opt., 1997, 36: 6554.

    Google Scholar 

  109. Abel, A. P., Weller, M. G., Duveneck, G. L., Ehart, M., Widmer, H. M. Anal. Chem., 1996, 68: 2905.

    CAS  Google Scholar 

  110. Polzius, R., Diessel, E., Bier, F. F., Bilitewski, U. Anal. Biochem., 1997, 248: 269.

    CAS  Google Scholar 

  111. Homola, J., Yee, S. S., Gauglitz, G. Sensor. Actuat. B-Chem., 1999, 54: 3.

    Google Scholar 

  112. Nikitin, P. I., Beloglazov, A. A., Kochregin, V. E., Valeiko, M. V., Ksenevich, T. I. Sensor. Actuat. B-Chem., 1999, 54: 43.

    Google Scholar 

  113. Drott, J., Lindstrom, K., Rosengren, L., Laurell, T. J. Micromech. Microeng., 1997, 7: 14.

    CAS  Google Scholar 

  114. Laurell, T., Drott, J., Rosengern, L., Lindstrom, K. Sensor. Actuat. B-Chem., 1996, 31: 161.

    Google Scholar 

  115. Beattie, K. L., Beattie, W. G., Mengm, L., Turner, S. L., Coral-Vazquez, R., Sith, D. D., Mclntyre, P. M., Dao, D. D. Clin. Chem., 1995, 41: 700.

    CAS  Google Scholar 

  116. Gamper, H. B., Reed, M. W., Cox, T., Virosco, J. S., Adams, A. D., Gall, A. A., Scholler, J. K., Meyer, R. B. Nucleic Acids Res., 1993, 21: 145.

    CAS  Google Scholar 

  117. Toulokhonovat, I., Zhao, R., Kozee, M., West, R. Main Group Met. Chem., 2001, 24: 737.

    Google Scholar 

  118. Hendrickson, W. A., Pahler, A., Smith, J. L., Satow, Y., Merritt, E. A., Phizackerley, R. P. Proc. Natl. Acad. Sci., 1989, 86: 2190.

    CAS  Google Scholar 

  119. Jang, S., Kim, J., Koh, Y., Park, J., Woo, H. G., Kim, S., Sohn, H. J. Nanosci. Nanotechnol., 2008, 8: 5166.

    CAS  Google Scholar 

  120. Koh, Y., Kim, S. J., Park, J., Park, C., Cho, S., Woo, H. G., Ko, Y. C., Sohn, H. B. Kor. Chem. Soc., 2007, 28: 2083.

    CAS  Google Scholar 

  121. Stuchbury, T., Shipton, M., Norris, R., Malthouse, J. P. G., Brocklehurst, K., Herbert, J. A. L., Suschitzky, H. Biochem. J., 1975, 151: 417.

    CAS  Google Scholar 

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  1. Department of Chemistry, Chosun University, Gwangju, 501-759, the Republic of Korea

    Honglae Sohn & Seunghyun Jang

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Sohn, H., Jang, S. (2011). Chemical and Biological Sensors Based on Porous Silicon Nanomaterials. In: Advanced Functional Materials. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-19077-3_5

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