Thermal Characteristics of Microcantilever Biosensors

  • Mohd. Zahid Ansari
  • Chongdu Cho
Part of the Communications in Computer and Information Science book series (CCIS, volume 127)


This study investigates the thermal deflection characteristics of microcantilever biosensors due to bimetallic effects. Thermal deflections are a major source of noise in microcantilever biosensors. Therefore, by characterising the thermal behaviour, the accuracy of the biosensors can be improved significantly. A commercial finite element analysis software ANSYS Multiphysics is used to analyse the deflection characteristics of gold-coated silicon microcantilevers. The cantilever is first subject to temperature increase and then to combined temperature increase and surface stress. The simulation results are compared against analytical and available experimental results. Results show that both thermal stress and surface stress have linear effect on the cantilever deflection and can be added algebraically to determine the absolute deflection produced entirely by the surface stress. Further, we show that by using double-coated silicon microcantilevers thermal deflections in the biosensors can be eliminated.


Coefficient of thermal expansion (CTE) Thermal strain Bimetallic effects Microcantilever biosensor 


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Copyright information

© Springer-Verlag Berlin Heidelberg 2011

Authors and Affiliations

  • Mohd. Zahid Ansari
    • 1
  • Chongdu Cho
    • 1
  1. 1.Department of Mechanical EngineeringInha UniversityNam-KuRepublic of Korea

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