MEMS Processing and Fabrication Techniques and Technology—Silicon-Based Micromachining

  • Zhihong Li
  • Bo Liu
  • Wei Wang

Abstract

The silicon-based micromachining technology, which is originated from the silicon IC (integrated circuits) technology, is the mainstream technology for MEMS fabrication, and the most MEMS products on market are manufactured with this technology. The silicon-based micromachining technologies can be divided into two categories: surface micromachining technology and bulk micromachining technology. Instead of introducing detailed individual techniques, this chapter will focus on utilizing and combining different processes to achieve different device fabrication and meet different requirements. For surface micromachining, isolation, metallization and monolithic integration are specially emphasized; while for bulk micromachining, we discuss more details on different sets of processes after a brief introduction of individual processes, such as DRIE and bonding.

Keywords

Surface micromachining bulk micromachining DRIE bonding integration 

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Copyright information

© Tsinghua University Press, Beijing and Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  • Zhihong Li
    • 1
  • Bo Liu
    • 1
  • Wei Wang
    • 1
  1. 1.Institute of MicroelectronicsPeking UniversityBeijingChina

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