Development of Highly Active Catalyst for Si-Microcalorimetric Gas Sensor

Khatko, V. V.; Logothetis, E. M.; Soltis, R. E.; Hangas, J. W.; McBride, J. R.

doi:10.1007/978-3-642-18146-7_3

V. V. Khatko²,
E. M. Logothetis³,
R. E. Soltis³,
J. W. Hangas³ &
…
J. R. McBride³

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Abstract

We are interested in the development of catalytic materials that are suitable for incorporation onto micromachined silicon gas sensors. The goal of the work is to explore methods to increase the activity and surface area of Pd and Pt catalysts. We employ sputtering techniques to fabricate catalytic layers with small grain size. In this paper, we study the catalytic properties of Pt/SiO₂, Pd/SiO₂, Pd/Al₂O₃, Pt/Al₂O₃, Pd/Au and Pt/Cr multilayer stacks formed by successive step-by-step deposition of ultra-thin films of the corresponding materials.

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Authors and Affiliations

Physical Technical Institute, National Academy of Sciences, Kuprevich 10, 220141, Minsk, Belarus
V. V. Khatko
Ford Research Laboratory, Dearborn, MI, 48121, USA
E. M. Logothetis, R. E. Soltis, J. W. Hangas & J. R. McBride

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V. V. Khatko
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E. M. Logothetis
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R. E. Soltis
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J. W. Hangas
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J. R. McBride
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VDI/VDE-Technologiezentrum Informationstechnik GmbH, Rheinstr. 10B, D-14513, Teltow, Germany
Sven Krüger & Wolfgang Gessner &

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Khatko, V.V., Logothetis, E.M., Soltis, R.E., Hangas, J.W., McBride, J.R. (2000). Development of Highly Active Catalyst for Si-Microcalorimetric Gas Sensor. In: Krüger, S., Gessner, W. (eds) Advanced Microsystems for Automotive Applications 2000. VDI-Buch. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-18146-7_3

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DOI: https://doi.org/10.1007/978-3-642-18146-7_3
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-62107-9
Online ISBN: 978-3-642-18146-7
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