Abstract
As with laser-induced structural transformations, laser-induced surface doping takes advantage of the high heating and cooling rates that can be achieved with lasers. The short temperature cycles enable one to produce very shallow, heavily doped layers within solid surfaces. Pulsed lasers are mainly used for both large-area doping and local doping by projection. Cw lasers allow local doping by direct writing. In any case, the absorbed light intensity must be high enough to substantially heat or even melt the sample surface in order to allow dopant incorporation by high-temperature diffusion or liquid-phase transport. The dopant source may be an adsorbate, a gas, a liquid, or an evaporated film.
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Bäuerle, D. (2011). Doping. In: Laser Processing and Chemistry. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-17613-5_24
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