Skip to main content

Theoretical Approaches of Mobile Ions Density Distribution Determination

  • Chapter
  • First Online:
Transport in Metal-Oxide-Semiconductor Structures

Part of the book series: Engineering Materials ((ENG.MAT.))

Abstract

Nevertheless, none of the experimental techniques so developed has been used to determine the density distribution of mobile ions. However, a few earlier theoretical attempts have been made in this direction, which are reviewed in this chapter. Besides, our empirical approaches are presented that can be used to determine the equilibrium density distribution of the mobile ions within the oxide of the MOS structures. The first approach has been investigated by using a general expression and experimental data before and after the drift takes place of the ions from one end to the other under the thermal–electric stress. However, the second approach is based on an empirical expression that has been derived for the total ion concentration in terms of the flat-band voltage shifts one before and another after thermal electric stress under different assumed distribution and thereafter comparing the computing values with experimental ones. Almost results up with the distribution of ion are Gaussian. Finally, our numerical approach to simulate the mobile ions density distribution; by solving a partial differential equation governing the ions kinetic is also presented.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 84.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Chou, N.J.: Application of triangular voltage sweep method to mobile charge studies in MOS structures. J. Electrochem. Soc. 118, 601–609 (1971)

    Article  CAS  Google Scholar 

  2. Przewlocki, H.M., Marciniak, W.: The triangular voltage sweep method as a tool in studies of mobile charge in MOS structures. Phys. Stat. Sol. A 29, 265–274 (1975)

    Article  CAS  Google Scholar 

  3. Tangena, A.G., Middelhoek, J., DeRooij, N.F.: Influence of positive ions on the current–voltage characteristics of MOS structures. J. Appl. Phys. 49, 2876–2879 (1978)

    Article  CAS  Google Scholar 

  4. Romanov, V.P., Chaplygin, Yu.A.: Stationary distribution of mobile charge in the dielectric of MOS structures. Phy. Stat. A 53, 493–498 (1979)

    Google Scholar 

  5. Derbenwick, G.F.: Mobile ions in SiO2: potassium. J. Appl. Phys. 48, 1127–1130 (1977)

    Article  CAS  Google Scholar 

  6. Snow, E.H., Grove, A.S., Deal, B.E., Sah, C.T.: Ion transport phenomena in insulating films. J. Appl. Phys. 36, 1664–1673 (1965)

    Article  CAS  Google Scholar 

  7. Hillen, M.W., Verwey, J.F.: Mobile ions in SiO2 layers on Si. In: Barbottain, G., Vapaille, A. (eds.) Instabilities in Silicon Devices. North-Holland, Amsterdam (1986)

    Google Scholar 

  8. Yon, E., Ko, W.H., Kuper, A.B., IEEE Trans. Elect. Dev. ED-13, 276 (1966)

    Google Scholar 

  9. Raychaudhuri, A., Ashok, A., Kar, S.: Ion-dosage dependent room-temperature hysteresis in MOS structures with thin oxides. IEEE Trans. Elect. Dev. 38, 316–322 (1991)

    Article  CAS  Google Scholar 

  10. Grove, A.S., Deal, B.E., Snow, E.H., Sah, C.T.: Investigation of thermally oxidized silicon surface using MOS structures. Solid Stat. Elec. 145–163 (1965)

    Google Scholar 

  11. Bentarzi, H., Bouderbala, R., Mitra, V.: Mobile Ion Distribution in the Oxide of MOS Structure, vol. 2, pp. 85–92. AMSE Press, Malta (1993)

    Google Scholar 

  12. Bentarzi, H., Bouderbala, R., Mitra, V.: Determination of the distribution of mobile charges in the oxide of the MOS structure, vol. II, pp. 106–111. ESD’94, Brno (1994)

    Google Scholar 

  13. Mitra, V., Bentarzi, H., Bouderbala, R., et al.: A theoretical model for the density-distribution of mobile ions in the oxide of the metal–oxide-semiconductor structures. J. Appl. Phys. 73, 4287–4291 (1993)

    Article  CAS  Google Scholar 

  14. Grove, A.S.: Physics and Technology of Semiconductor Devices. Wiley, New York (1967)

    Google Scholar 

  15. Nicollian, E.H., Brews, J.R.: MOS Physics and Technology. Wiley, New York (1982)

    Google Scholar 

  16. Snow, E.H., Grove, A.S., Deal, B.E., et al.: Ion transport phenomena in insulating films. J. Appl. Phys. 36, 1664–1673 (1965)

    Google Scholar 

  17. Constantinides, A.: Applied Numerical Methods with Personal Computers. McGrawHill, New York (1987)

    Google Scholar 

  18. Bentarzi, H., Bouderbala, R., Zerguerras, A.: Simulation of ion density distribution in the gate oxide of MOS structures. AMSE Trans. Modell. Meas. Control 76, 13–23 (2003)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Hamid Bentarzi .

Rights and permissions

Reprints and permissions

Copyright information

© 2011 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Bentarzi, H. (2011). Theoretical Approaches of Mobile Ions Density Distribution Determination. In: Transport in Metal-Oxide-Semiconductor Structures. Engineering Materials. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-16304-3_6

Download citation

Publish with us

Policies and ethics