Integrated Computer Models of 3-D Comb Drive Electrostatic MEMS Structures

  • Sławomir Wiak
  • Krzysztof Smółka
Part of the Studies in Computational Intelligence book series (SCI, volume 327)


This paper deals with the numerical modeling of 3D structure of surface micromachined MEMS different comb drive geometries. The paper is devoted to the complex strategy of modeling, proposed by authors, of micro-actuators of comb structure. This methodology is based on vector field 3-D structural models and the object oriented models and lumped parameters as well, applied to the different structure of MEMS.


Solid Modeling Object Oriented Model Movable Part Comb Drive Comb Structure 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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© Springer-Verlag Berlin Heidelberg 2010

Authors and Affiliations

  • Sławomir Wiak
    • 1
  • Krzysztof Smółka
    • 1
  1. 1.Institute of Mechatronics and Information SystemsTechnical University of LodzLodzPoland

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