Errata to: EngMat

DOI: 10.1007/978-3-642-15411-9

Preface (pp. v–vi)

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p. vi

Akita

Sendai

City name for H. Tohmyoh

Introduction (pp. 1–14)

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None

   

Basis of Atomic Diffusion (pp. 15–52)

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p. 16, line 13

results

result

Delete “s”

p. 23, line 19

acceleration test of EM

acceleration test of EM for IC Al lines

Add “for IC Al lines”

p. 26, line 9

j x

j x

Put “x” in italics

p. 26, line 10

J x

j x

Decapitalize “J” and put “x” in italics

p. 27, line 4

,

.

Change comma to period after Eq. (33)

p. 30, line 17

0.00442

0.00442.

Add period

p. 34, line 6

\( - 2\left. {\frac{{\kappa \Upomega \partial^{2} N}}{{N_{0} \partial x\partial y}}\sin \,2\theta } \right\} \)

\( - 2\left. {\frac{\kappa \Upomega }{{N_{0} }}\frac{{\partial^{2} N}}{\partial x\partial y}\sin \,2\theta } \right\} \)

Divide into two fractions

p. 37, line 5

Printed

\( + \frac{\sqrt 3 }{4}\pi d\left[ { - \frac{\kappa \Upomega }{{N_{0} }}\left( {\frac{{\partial^{2} N}}{2} + \frac{{\partial^{2} N}}{{\partial y^{2} }}} \right) - \frac{{\kappa \Upomega /N_{0} }}{kT}\left( {D_{x} \frac{\partial N}{\partial x} + D_{y} \frac{{}}{\partial y}} \right)} \right. \)

Should be

\( + \frac{\sqrt 3 }{4}\pi d\left[ { - \frac{\kappa \Upomega }{{N_{0} }}\left( {\frac{{\partial^{2} N}}{{\partial x^{2} }} + \frac{{\partial^{2} N}}{{\partial y^{2} }}} \right) - \frac{{\kappa \Upomega /N_{0} }}{kT}\left( {D_{x} \frac{\partial N}{\partial x} + D_{y} \frac{\partial N}{\partial y}} \right)} \right. \)

Comment

Insert “∂x” into denominator and “∂N” into numerator

p. 37, line 14

comparing

comparing void formation in

Add “void formation in”

p. 38, line 3

Printed

\( = \frac{{\sqrt{3}}d^{2}}{4\delta }\left[ {AFD_{\text{gen}}^{*} |{\text{end}} + \frac{{\partial AFD_{\text{gen}}^{*} |{\text{end}}}}{\partial x}\left( {l_{d} - l^{*} } \right)} \right] \)

Should be

\( = \frac{{\sqrt{3}}d^{2}}{4\delta }\left[ {AFD_{\text{gen}}^{*} |{\text{end}} + \frac{{\partial AFD_{\text{gen}}^{*} |{\text{end}}}}{\partial x}\left( {l_{d} - l^{*} } \right)} \right] \)

 

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Put “end” in inferior

p. 38, line 11

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\( v_{d} = \left[ {AFD_{\text{gen}}^{*} |{\text{end}} + \frac{{\partial AFD_{\text{gen}}^{*} |{\text{end}}}}{\partial x}\left( {l_{d} - l^{*} } \right)} \right]l^{*} \Upomega \)

Should be

\( v_{d} = \left[ {AFD_{\text{gen}}^{*} |_{\text{end}} + \frac{{\partial AFD_{\text{gen}}^{*} |_{\text{end}} }}{\partial x}\left( {l_{d} - l^{*} } \right)} \right]l^{*} \Upomega \)

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Put “end” in inferior

p. 39, line 4

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\( F_{\text{gb}}^{*} |{\text{end = }}\sum\limits_{i} {} \sum\limits_{j} {} \left\{ {v_{d} |_{ij} - \left[ {(AFD_{\text{gen}}^{*} |{\text{end)}}_{i} + \left( {\frac{{\partial AFD_{\text{gen}}^{*} |{\text{end}}}}{\partial x}} \right)_{i} (l_{d} |_{ij} - l^{*} )} \right]l^{*} \Upomega } \right\}^{2} \)

Should be

\( F_{\text{gb}}^{*} |_{\text{end}} { = }\sum\limits_{i} {} \sum\limits_{j} {} \left\{ {v_{d} |_{ij} - \left[ {(AFD_{\text{gen}}^{*} |_{\text{end}} )_{i} + \left( {\frac{{\partial AFD_{\text{gen}}^{*} |_{\text{end}} }}{\partial x}} \right)_{i} (l_{d} |_{ij} - l^{*} )} \right]l^{*} \Upomega } \right\}^{2} \)

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Put “end” in inferior

p. 45, line 3 of figure caption of Fig. 14

[71]

[72]

Change reference number

Fabrication of Micro and Nano Metallic Materials (pp. 53–92)

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p. 55, line 17

‘the electro-thermal’

the ‘electro-thermal’

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p. 72, line 4

EM failure

EM failure in IC

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p. 72, line 12

Eqs. (55), (57)

Eqs. (55)–(57)

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p. 72, line 13

Eq. (58) in Basis of Atomic Diffusion given in Sect. 1.7 in Basis of Atomic Diffusion

Eq. (58) given in Sect. 1.7 in Basis of Atomic Diffusion

Delete the first “in Basis of Atomic Diffusion”

p. 73, line 2

Assuming

Assume

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p. 81, line 15

chpater

chapter

Misspelling

p. 89, line 17

Acknowledgments

Acknowledgment

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Evaluation of Mechanical Properties (pp. 93–142)

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Comment

p. 99, line 4

called as

called the

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p. 101, in 3rd line from bottom

large value.

large value (see Sect. 2.4).

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p. 101, in 2nd line from bottom

called as

called the

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p. 102, line 6

called as

called

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p. 105, in 4th line after Eq. (12)

rotary inertia)

rotary inertia

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p. 113, line 4

Sect. 3.3.1

Sect. 3.1 in the preceding chapter

Replace “3.3.1” with “3.1 in the preceding chapter”

p. 124, in 1st line before Eq. (62)

in Eq. (53)

in Eq. (42)

Change 53 to 42

p. 130, line 16

spuattering

spattering

Misspelling

p. 133, line 1

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Delete indent

Nano/Micromaterials

Should be

Nano/Micromaterials

p. 136, line 1 of figure caption of Fig. 31

aEbσYcE’

aEbσYcE’

Insert a space for each

p. 137, in Acknowledgments

M.Muraoka.

H.Tohmyoh.

M. M.

H. T.

Change to initials

Evaluation of Electrical Properties (pp. 143–172)

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Comment

p. 145, line 15

nanowires

nanowire

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p. 146, line 28

diameter a the only lateral dimension

diameter is the only lateral dimension

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p. 151, the end of the caption of Fig. 4

 

(scale bar 2μm)

Add (scale bar 2μm)

p. 152, line 24

[24, 29]

[25, 28]

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p. 152, line 37; p. 154, lines 4, 8 and 18; p. 156, line 14

[29]

[28]

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p. 157, the last line of caption of Fig. 9

the mean

the variation of them

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p. 157, line 11

is on the nanometer

on the nanometer

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p. 158, line 17

[27]

[23]

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p. 158, line 29

[25, 26, 30, 31]

[26, 29, 30, 31]

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p. 159, lines 9, 26 and 34

[25]

[26]

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p. 159, line 16

strong

strongly

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p. 159, line 36; p. 161, line 7

[26]

[29]

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p. 163, line 11

the step height of

the step height is

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p. 165, line 5

simultaneous

simultaneously

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p. 166, line 11–12

[23, 28]

[24, 27]

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p. 167, line 1

Symbolω

Symbol ω

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p. 167, lines 4 and 8

[28]

[24]

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p. 168, line 12

Eqs. 5–8 and 5–11

Eqs. 8 and 11

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p. 169, the last line of caption of Fig. 19

13

12

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p. 170, ref. 28

(2007a)

(2007)

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p. 170, ref. 29

(2007b)

(2007)

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p. 171, line 5

31.

32.

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Modification of Nano/Micromaterials (pp. 173–220)

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Comment

p. 173, line 7 in Abstract

in thin wires are

in thin wires is

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p. 175, line 1 of figure caption of Fig. 2

10-nmdiameter

10-nm diameter

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p. 177, line 6 from bottom

K = 72 W/mK

K = 72 W/(mK)

“mK” should be parenthesized

p. 177, line 5 from bottom

c = 134 J/kg K

c = 134 J/(kg K)

“kg K” should be parenthesized

p. 179, in 13th line from bottom

K = 72 W/mK

K = 72 W/(mK)

“mK” should be parenthesized

p. 179, in 13th line from bottom

c = 134 J/kg K

c = 134 J/(kg K)

“kg K” should be parenthesized

p.179, in 12th line from bottom

H = 30 W/m2K

H = 30 W/(m2K)

“m2K” should be parenthesized

p. 181, line 2

Eq. (1).

1.2.

Change Eq. (1) to 1.2

p. 183, Table 1

I/A

I/A

Variables I and A should be italic

p. 188, line 2 of figure caption of Fig. 12

of A in b

of A in a

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p. 188, in 5th line from bottom

Figure 13a–d correspond to

Figure 13a–d corresponds to

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p. 192, line 6

shown experimentally

experimentally

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p. 196, line 10

Figure 20a and b represents

Figure 21a and b represents

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p. 196, line 12

Figure 21a–d shows

Figure 21c and d shows

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p. 203, line 6 of figure caption of Fig. 27

electrode 3 and 4

electrodes 3 and 4

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p. 204, line 5

in the previous section,

in Sect. 2.3.2,

Change “the previous section” to “Sect. 2.3.2”

p. 205, in 9th- 10th lines from bottom

SiC ([68], BC [33], and NaFe4P12 [32] have

SiC [68], BC [33], and NaFe4P12 [32], have

Delete a parenthesis and insert a comma after [32]

p. 210, line 7

Sect. 3.3.1

Sect. 3.1 in Fabrication of Micro and Nano Metallic Materials

Replace “3.3.1” with “3.1 in Fabrication of Micro and Nano Metallic Materials”

p. 216, in 7th line from bottom

(See Table 1

(see Table 1

Change to lowercase

p. 216, in 6th line from bottom

(See Fig.21a

(see Fig. 21a

Change to lowercase and insert a space before 21a

Index (pp. 221–225)

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Comment

p. 221

Acceleration test, 23, 25, 33, 38, 40, 42, 45, 49

Acceleration test, 23, 25, 33, 38, 40, 42

Delete 45 and 49

p. 221

Anodic alumina, 5, 6, 145

Anodic alumina, 5, 6, 146

Change 145 to 146

p. 221

Aspect ratio, 46, 57, 59, 159, 160

Aspect ratio, 46, 57, 59, 159, 162

Change 160 to 162

p. 221

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Delete 35 for atomic diffusion

Atomic

Delete 48 and 63 for atomic flux

diffusion, 11, 15, 16, 18, 19, 35, 36, 43, 46, 54, 82, 212

flux, 15, 17-21, 33, 36-38, 47, 48, 63, 66

Should be

Atomic

diffusion, 11, 15, 16, 18, 19, 36, 43, 46, 54, 82, 212

flux, 15, 17-21, 33, 36-38, 47, 66

 

p. 221

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Insert a hyphen before “strength” and change 129 to 128

Bond-order-bond-length-bond strength (bond-OLS) correlation, 129

 

Should be

Bond-order-bond-length-bond-strength (bond-OLS) correlation, 128

p. 221

Brass (BS), 168

Brass (BS), 169

Change 168 to 169

p. 221

Cantilever, 94, 98, 105, 107, 110, 121, 129, 133, 152, 159, 162, 213

Cantilever, 94, 98, 105, 107, 110, 121, 129, 133, 152, 160, 162, 213

Change 159 to 160

p. 221

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Delete 34

Characteristic

constant, 15, 34, 35, 37, 39, 41, 42

Should be

Characteristic

constant, 15, 35, 37, 39, 41, 42

p. 221

Coaxial line, 163, 164, 167

Coaxial line, 164, 167

Delete 163

p. 221

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Change 160 to 161 for crystalline plane

Crystalline, 99, 112, 213 plane, 159, 160

Should be

Crystalline, 99, 112, 213 plane, 159, 161

p. 222

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Indent “modulus”

Elastic

modulus, 2, 12, …

Should be

Elastic

modulus, 2, 12, …

p. 222

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Replace a hyphen with a space before “evaporation”

Electron, 17, 35, 43, 48

-beam-evaporation technique (EBET), 210

Should be

Electron, 17, 35, 43, 48

-beam evaporation technique (EBET), 210

p. 223

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Insert a space before “fit”

Least-squares method (least-squaresfit), 38,

Should be

Least-squares method (least-squares fit), 38,

p. 223

Lifetime, 16, 19, 20, 34, 62, 75, 78, 79, 80

Lifetime, 16, 19, 20, 35, 62, 75, 78, 79, 80

Change 34 to 35

p. 223

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Replace a hyphen with a space before “atom”

Lower-coordinated surface-atom, 128

Should be

Lower-coordinated surface atom, 128

p. 223

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Add 102 for mechanical diode and delete 136 for mechanical property

Mechanical

diode (MD), 101

property, 45, 93, 126, 130, 136

Should be

Mechanical

diode (MD), 101, 102

property, 45, 93, 126, 130

p. 223

Misfit strain, 206, 208, 214

Misfit strain, 205, 208, 214

Change 206 to 205

p. 223

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2 is inferior

Molybdenum disulfide (MoS2),

Should be

Molybdenum disulfide (MoS2),

p. 223

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Delete “of area” and add 109

Moment

of inertia, see also rotary inertiaof area, 104

Should be

Moment

of inertia, see also rotary inertia, 104, 109

p. 224

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Insert a space after “deposition” and add 76

Plasma-enhanced chemical vapor deposition(PE-CVD), 39

Should be

Plasma-enhanced chemical vapor deposition (PE-CVD), 39, 76

p. 224

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Move 97 behind “Polycrystalline” and delete 36

Polycrystalline

line, 18, 20, 33, 34, 35, 36, 37, 74, 97

Should be

Polycrystalline, 97

line, 18, 20, 33, 34, 35, 37, 74

p. 224

Rotary inertia, 105, 109, 114

Rotary inertia, 105, 114

Delete 109

p. 224

Printed

Delete one 44 for scanning electron microscope Change 162 to 163 for scanning profile

Scanning

electron microscope (SEM), 42, 44, 44, 47,

profile, 162, 165

Should be

Scanning

electron microscope (SEM), 42, 44, 47,

profile, 163, 165

p. 224

Silicon (Si)

Silicon (Si)

2 is inferior

dioxide (SiO2),

dioxide (SiO2),

p. 224

Silicon (Si)

Silicon (Si)

3 and 4 are inferior

nitride (Si3N4),

nitride (Si3N4),

p. 224

Size-dependent, 144, 145, 169

Size-dependent, 144, 145

Delete 169

p. 225

Printed

Delete 19 for stress migration

Delete 44 and 46 for stress release

Stress

migration (SM), 4, 6, 15, 19, 42, 43, 45, 46, 47, 48, 113

release, 11, 44, 46, 54

Should be

Stress

migration (SM), 4, 6, 15, 42, 43, 45, 46, 47, 48, 113

release, 11, 54

p. 225

Printed

Add another expression

Template

assisted synthesis, 146

Should be

Template

assisted synthesis, 146

-based synthesis, 4, 5, 6

p. 225

Printed

2 is inferior

Tin dioxide (SnO2),

Should be

Tin dioxide (SnO2),

Back Cover

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Should be

Comment

line 18

expected are

expected to be

Delete “expected are”

expected to be

Table 10 Evaluation of Electrical Properties (pp. 143–172)