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Piezoceramic Scanners for Probe Nanomicroscopes

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Piezoceramic Sensors

Part of the book series: Microtechnology and MEMS ((MEMS))

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Abstract

Nanotechnologies are a set of methods which make it possible to create and modify objects with components sized 100 nm and smaller. These components have principally new qualities. They assure integration into fully functioning systems of a larger scale [1, 2].

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Authors and Affiliations

  1. Instrument-making, Cherkasy State Technological University, Shevchenko blvd. 460, 18006, Cherkasy, Ukraine

    Professor Valeriy Sharapov

Authors
  1. Professor Valeriy Sharapov
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Correspondence to Valeriy Sharapov .

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Sharapov, V. (2011). Piezoceramic Scanners for Probe Nanomicroscopes. In: Piezoceramic Sensors. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-15311-2_16

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