Abstract
Nanotechnologies are a set of methods which make it possible to create and modify objects with components sized 100 nm and smaller. These components have principally new qualities. They assure integration into fully functioning systems of a larger scale [1, 2].
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
P.P. Maltsev (ed.), Nanomaterials. Nanotechnologies. Nanosystem Equipment (Tekhnosfera, Moscow, 2006) (in Russian)
U.A. Chapligin (ed.), Nanotechnologies in Electronics (Tekhnosfera, Moscow, 2005), p. 448 (in Russian)
R. Young, I. Ward, F. Scire, The topographiner: an instrument for measuring surface microtopography. Rev. Sci. Instrum. 43, 999 (1972)
G. Binning, H. Rohrer, Scanning tunneling microscope. U.S. Patent 4343993, 10 Aug 1982 (Filed: 12 Sept 1980)
V.K. Nevolin, Probe Nanotechnologies in Electronics (Tekhnosfera, Moscow, 2005), p. 152(in Russian)
G. Binnig, H. Rohrer, Scanning tunneling microscopy. Helv. Phys. Acta 55(6), 726–735 (1982)
D.I. Blohintsev, Basics of Quantum Mechanics (Nauka, Moscow, 1983) (in Russian)
L.D. Landau, E.M. Lifshits, Theoretical Physics, Quantum Mechanics, vol. 3 (Phizmatlit, Moscow, 2001), p. 804 (in Russian)
V.L. Mironov, Basics of Scanning Probe Microscopy (Technosfera, Moscow, 2004), p. 144(in Russian)
G. Binning, C.F. Quate, Ch. Gerber, Atomic force microscope. Phys. Rev. Lett. 56(9), 93–933 (1986)
Yu.S. Barash, Van der Waals Forces (Nauka, Moscow, 1988), p. 344c
Y. Martin, Wickramasinghe. Magnetic imaging by force microscopy with 1000 Å resolution. Appl. Phys. Lett. 50(20), 1455–1457 (1987)
D. Rugar, H. Mamin, P. Guethner et al., Magnetic force microscopy: general principles and application to longitudinal recording media. J. Appl. Phys. 68(3), 1169–1182 (1990)
I.E. Tamm, Basics of Electricity Theory (Nauka, Moscow, 1976), p. 616 (in Russian)
G.M. Binnig, D. Smith, Tubular three-coordinate transducer for scanning electron microscope, Devices for scientific researches (1986), p. 152
G.M. Binnig, D. Smith, Single-tube three-dimensional scanner for scanning tunneling microscopy. Rew. Sci. Instrum. 58(8), 1688 (1986)
N.A. Shulga, A.M. Bolkisev, Vibrations of Piezoelectric Bodies (Naukova Dumka, Kiev, 1990), p. 228 (in Russian)
V. Sharapov, A. Vladisauskas, S. Filimonov, Bimorph cylindrical piezoceramic scanner for scanning probe nano-microscopes, Ultragarsas (Ultrasound) 4(64), ISSN 1392–2114 (Technologia, Kaunas, 2009)
V.M. Sharapov, A.N. Ghyrzhy, S.O. Filimonov, Piezoelectric scanner, Patent of UkraineNo 22601 (2007) (in Ukrainian)
A.B. Smirnov, Mechatronics and Robotics. Micro-movement Systems with Piezoelectric Actuators: Teaching Aid (SPbSPU Publishing, St. Petersburg, 2003) (in Russian)
V. Sharapov, A. Vladisauskas, S. Filimonov, Piezoceramic scanners on the basis of planar bimorph piezoelements for scanning probe nanomicroscopes. Ultragarsas (Ultrasound) 1(65) (Technologia, Kaunas, 2010), ISSN 1392–2114
V.M. Sharapov, M.P. Musienko, E.V. Sharapova, in Piezoelectric Sensors, ed. byV.M. Sharapov (Technosphera, Moscow, 2006), p. 632 (in Russian)
V.M. Sharapov et al., in Sensors, ed. by V.M. Sharapov, E.S. Polischuk (Brama, Cherkasy, 2008), p. 1072 (in Russian)
L.A. Ostrovskiy, General Theory Basics of Electric Devices (Energia, Leningrad, 1971), p. 544 (in Russian)
V.M. Sharapov, A.N. Ghyrzhy, A.P. Alpatov, S.A. Filimonov, Piezoscanner, Patent of Ukraine No 22600, Cl. G12B 21/20 H01L 41/00, Bull. No 5 (2007) (in Ukrainian)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
Copyright information
© 2011 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Sharapov, V. (2011). Piezoceramic Scanners for Probe Nanomicroscopes. In: Piezoceramic Sensors. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-15311-2_16
Download citation
DOI: https://doi.org/10.1007/978-3-642-15311-2_16
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-15310-5
Online ISBN: 978-3-642-15311-2
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)