Assembly of 3D Reconfigurable Hybrid MOEMS through Microrobotic Approach

  • Kanty Rabenorosoa
  • Sylwester Bargiel
  • Cédric Clécy
  • Philippe Lutz
  • Christophe Gorecki


Micro-assembly has been identified to be a critical technology in the microsystems technology and nanotechnology. Increasing needs of MOEMS (Micro-Opto-Electro- Mechanical Systems) for microsystems conducts to development of new concepts and skilled micro-assembly stations. This paper presents a 3D micro-assembly station used for the reconfigurable free space micro-optical benches (RFS-MOB) which are a promising type of MOEMS. Designed parts of RFS-MOB are assembled by using the developed micro-assembly station. The flexibility of the micro-assembly station provides the possibility to manipulate a variety of micro-components. The RFS-MOB design enables to reduce adhesion forces effects during releasing operations. Experimental results are shown and validate the effectiveness of the micro-assembly station and micro-assembly strategies.


Assembly Sequence Optical Component Microfabrication Process International Design Engineer Technical Conference Ball Lens 
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Copyright information

© Springer-Verlag Berlin Heidelberg 2010

Authors and Affiliations

  • Kanty Rabenorosoa
    • 1
  • Sylwester Bargiel
    • 2
  • Cédric Clécy
    • 1
  • Philippe Lutz
    • 1
  • Christophe Gorecki
    • 2
  1. 1.Automatic Control and Micro-Mechatronic Systems depart.(AS2M department)FEMTO-st Inst., UMRS CNRS 6174 - UFC/ENSMM/CNRSBesanconFrance
  2. 2.Micro Nano Sciences, and Systems depart. (MN2S department)FEMTO-st Inst., UMRS CNRS 6174 - UFC/ENSMM/CNRSBesanconFrance

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