Design of Sensors for Position Control of Microactuators

  • A. Kornfeld
  • C. Kolleck
  • A. Ostendorf
Part of the Microtechnology and MEMS book series (MEMS)


For position control of a microlinear motor, an interferometrical principle was combined with an incremental sensing method, in order to achieve a resolution below 100 nm. A reflection grating placed on the moving slide is coherently illuminated by a laser beam, to allow the first two orders of the reflected beam to interfere with each other in an optical 3×3 coupler. The beat signal induced by the movement of the grating is detected as an intensity modulation in three phase-shifted output signals. The evaluation of these signals enables the measurement of both the distance and the direction of the slide’s movement. The required technologies for the manufacturing, preparation, alignment, and assembly of the involved optical elements were applied. This includes refractive-index modification of glass, the adaptation of microgrippers, the microlens layout and selection, and the UV-curing of elements. The detection and the real time signal processing were realized, based on photodiode arrays and LabVIEW algorithms, respectively.


Field Programmable Gate Array Microlens Array Coupling Length Fiber Coupler Waveguide Coupler 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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© Springer Berlin Heidelberg 2011

Authors and Affiliations

  1. 1.Laser Zentrum HannoverHanoverGermany

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