Modular Computer Aided Design Environment for Active Microsystems

  • U. Triltsch
  • U. Hansen
  • C. Boese
  • J. R. Ziebart
  • H.-J. Franke
  • T. Vietor
  • S. Büttgenbach
Part of the Microtechnology and MEMS book series (MEMS)


With the ambition to increase the yield and the ability of microsystems as well as to speed up development, a computer aided design environment for active microsystems has been developed. Multiple software modules have been combined to form a complex, object-oriented development framework that is able to support designers throughout the entire design process. Besides 3D-CAD-, development- and process simulation modules the tool comprises a workflow manager and the ability to analyze process parameters. Furthermore, it is connected to databases acting as a knowledge-, a product-, a process-, and a tool storage.


Tolerance Analysis Lithographic Mask Proximity Distance Tolerance Synthesis Optical Proximity Correction 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Berlin Heidelberg 2011

Authors and Affiliations

  • U. Triltsch
  • U. Hansen
  • C. Boese
  • J. R. Ziebart
  • H.-J. Franke
    • 2
  • T. Vietor
    • 2
  • S. Büttgenbach
    • 1
  1. 1.Institute for MicrotechnologyTechnische Universität BraunschweigBrunswickGermany
  2. 2.Institute for Engineering DesignTechnische Universität BraunschweigBrunswickGermany

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