Bistable Microvalve for Biomedical Usage
One example of the SFB 516 transfer work is a bistable microvalve which is planned to be integrated in implantable high precision dose infusion pumps typically used for patients with chronic pain or spasticity. The drug pumps are designed to have a 35 year lifespan within the patients body and work without an external energy supply. To adjust the drug rate to the individual needs of the patient, it is of utmost importance to provide a variable drug output rate. To achieve this goal, an innovative low-energy microvalve has been developed. Development and manufacturing of the microvalve are based on research results of the SFB 516, in particular those applicable to the drive unit, the silicon bulk micromachining, and the optimization of friction and wear.
KeywordsShape Memory Alloy Membrane Layer Valve Seat Mask Layer Shape Memory Alloy Actuator
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- 4.Kordon R (31.07.2000) Bistabiles Magnetventil. BSH Bosch und Siemens Hausgeräte GmbH, Munich (DE), patent DE10037251A1Google Scholar
- 5.Offereins HL, Sandmaier H, Folkmer B, Steger U, Lang W (1991) Stress free assembly technique for a silicon based pressure sensor. pp 986–989Google Scholar
- 7.Qiu J, Lang JH, Slocum AH (2001) A centrally-clamped parallel-beam bistable mems mechanism. pp 353–356Google Scholar
- 8.Quenzer HJ, Wagner B (10.02.1997) Bistable microactuator with coupled membranes. Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V., Munich (DE), patent US6168395B1Google Scholar
- 9.Seward KP (08.03.2001) Bistable microvalve and microcatheter system. The Regents of the University of California, Oakland, CA (US), patent US6565526B2Google Scholar
- 10.Wisskirchen M, Geser B (30.03.1994) Bistable electromagnet, in particular magnetic valve. Schrott, Harald, patent WO9423435Google Scholar