Bistable Microvalve for Biomedical Usage

  • A. Balck
  • C. Kirsch
  • U. Schmid
  • H. Seidel
  • M. Leester-Schädel
  • S. Büttgenbach
Part of the Microtechnology and MEMS book series (MEMS)


One example of the SFB 516 transfer work is a bistable microvalve which is planned to be integrated in implantable high precision dose infusion pumps typically used for patients with chronic pain or spasticity. The drug pumps are designed to have a 35 year lifespan within the patients body and work without an external energy supply. To adjust the drug rate to the individual needs of the patient, it is of utmost importance to provide a variable drug output rate. To achieve this goal, an innovative low-energy microvalve has been developed. Development and manufacturing of the microvalve are based on research results of the SFB 516, in particular those applicable to the drive unit, the silicon bulk micromachining, and the optimization of friction and wear.


Shape Memory Alloy Membrane Layer Valve Seat Mask Layer Shape Memory Alloy Actuator 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Berlin Heidelberg 2011

Authors and Affiliations

  • A. Balck
  • C. Kirsch
  • U. Schmid
  • H. Seidel
    • 2
  • M. Leester-Schädel
    • 1
  • S. Büttgenbach
    • 1
  1. 1.Institute for MicrotechnologyTechnische Universität BraunschweigBraunschweigGermany
  2. 2.Chair of Micromechanics, Microfluidics/MicroactuatorsUniversität des SaarlandesSaarbrückenGermany

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