Advertisement

Development and Fabrication of Electromagnetic Microactuators

  • A. Waldschik
  • M. Feldmann
  • V. Seidemann
  • S. Büttgenbach
Chapter
Part of the Microtechnology and MEMS book series (MEMS)

Abstract

In recent years several photoresists were introduced, tested, and optimized for the fabrication of components for electromagnetic microactuators. They serve as insulation layers as well as mold for electroplating of different materials like copper for conductors and nickel-iron alloys for soft magnetic functional structures. Several electromagnetic microactuators were developed and fabricated using these techniques. Over the past few years the actuators have become increasingly complex through the integration of additional components. The range of electromagnetic actuators could be completed by special polymer magnets which enable creation of any shape of hard magnetic structure. Thus, all types of electromagnetic actuators based on reluctance as well as the electro-dynamic principle can be realized.

Keywords

Synchronous Motor Helical Coil System Connection Electromagnetic Actuator Polymer Magnet 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Demmig S, Gehrking R, Feldmann M, Büttgenbach S, Ponick B (2006) Specific design rules for micro linear motors. In: Symposium on Power Electronics, Electrical Drives, Automation and Motion, pp 352357Google Scholar
  2. 2.
    Feldmann M, Büttgenbach S (2007) Linear variable reluctance (VR) micro motors with compensated attraction force: concept, simulation, fabrication and test. IEEE Transactions on Magnetics 43(6):25672569CrossRefGoogle Scholar
  3. 3.
    Feldmann M, Büttgenbach S (2007) Novel microrobots and micromotors using Lorentz force driven linear microactuators based on polymer magnets. IEEE Transactions on Magnetics 43(10):38913895CrossRefGoogle Scholar
  4. 4.
    FeldmannM,Waldschik A, Büttgenbach S (2007) Electromagnetic micro actuators, micro motors, and micro robots. In: Proc. of SPIE, vol 6798, pp 11/111/10Google Scholar
  5. 5.
    Feldmann M, Waldschik A, Büttgenbach S (2008) Synchronous micro motors: concept, fabrication and test. In: Proc. of Actuator 2008, pp 669672Google Scholar
  6. 6.
    Feldmann M, Waldschik A, Ruffert C, Gatzen H, Büttgenbach S (2008) Fabrication of drive and guide components for micro motors. Microsystem Technologies 14(12):19411947CrossRefGoogle Scholar
  7. 7.
    GehrkingR, Demmig S, PonickB, FeldmannM, Büttgenbach S (2006) A micro linear motor with integrated passive magnetic guidance. In: 32nd Annual Conference on IEEE Industrial Electronics, pp 12451250Google Scholar
  8. 8.
    Seidemann V, Edler J, Büttgenbach S, Stölting H (2003) Linear variable reluctance (VR) micro motor with horizontal flux guidance: concept, simulation, fabrication and test. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, vol 2, pp 14151418Google Scholar
  9. 9.
    Seidemann V, Kohlmeier T, Föhse M, Gatzen H, Büttgenbach S (2004) High aspect ratio spiral and vertical meander micro coils for actuator applications. Microsystem Technologies 10(6):564570CrossRefGoogle Scholar
  10. 10.
    Waldschik A, Büttgenbach S (2010) Micro gear pump with internal electromagnetic drive. Microsystem Technologies 16(8):15811587CrossRefGoogle Scholar
  11. 11.
    Waldschik A, Feldmann M, Büttgenbach S (2008) Novel synchronous linear and rotatory micro motors based on polymer magnets with organic and inorganic insulation layers. Sensors & Transducers Journal, Special Issue on Microsystems: Technology and Applications 3:313Google Scholar
  12. 12.
    Waldschik A, Feldmann M, Büttgenbach S (2008) Rotary variable reluctance (VR) micro motors: concept, simulation, fabrication and test. In: Proc. of Actuator 2008, pp 453456Google Scholar

Copyright information

© Springer Berlin Heidelberg 2011

Authors and Affiliations

  • A. Waldschik
    • 1
  • M. Feldmann
    • 1
  • V. Seidemann
    • 1
  • S. Büttgenbach
    • 1
  1. 1.Institute for MicrotechnologyTechnische Universität BraunschweigBraunschweigGermany

Personalised recommendations