Development and Fabrication of Electromagnetic Microactuators

  • A. Waldschik
  • M. Feldmann
  • V. Seidemann
  • S. Büttgenbach
Part of the Microtechnology and MEMS book series (MEMS)


In recent years several photoresists were introduced, tested, and optimized for the fabrication of components for electromagnetic microactuators. They serve as insulation layers as well as mold for electroplating of different materials like copper for conductors and nickel-iron alloys for soft magnetic functional structures. Several electromagnetic microactuators were developed and fabricated using these techniques. Over the past few years the actuators have become increasingly complex through the integration of additional components. The range of electromagnetic actuators could be completed by special polymer magnets which enable creation of any shape of hard magnetic structure. Thus, all types of electromagnetic actuators based on reluctance as well as the electro-dynamic principle can be realized.


Synchronous Motor Helical Coil System Connection Electromagnetic Actuator Polymer Magnet 
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Copyright information

© Springer Berlin Heidelberg 2011

Authors and Affiliations

  • A. Waldschik
    • 1
  • M. Feldmann
    • 1
  • V. Seidemann
    • 1
  • S. Büttgenbach
    • 1
  1. 1.Institute for MicrotechnologyTechnische Universität BraunschweigBraunschweigGermany

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