Abstract
In recent years several photoresists were introduced, tested, and optimized for the fabrication of components for electromagnetic microactuators. They serve as insulation layers as well as mold for electroplating of different materials like copper for conductors and nickel-iron alloys for soft magnetic functional structures. Several electromagnetic microactuators were developed and fabricated using these techniques. Over the past few years the actuators have become increasingly complex through the integration of additional components. The range of electromagnetic actuators could be completed by special polymer magnets which enable creation of any shape of hard magnetic structure. Thus, all types of electromagnetic actuators based on reluctance as well as the electro-dynamic principle can be realized.
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References
Demmig S, Gehrking R, Feldmann M, Büttgenbach S, Ponick B (2006) Specific design rules for micro linear motors. In: Symposium on Power Electronics, Electrical Drives, Automation and Motion, pp 352–357
Feldmann M, Büttgenbach S (2007) Linear variable reluctance (VR) micro motors with compensated attraction force: concept, simulation, fabrication and test. IEEE Transactions on Magnetics 43(6):2567–2569
Feldmann M, Büttgenbach S (2007) Novel microrobots and micromotors using Lorentz force driven linear microactuators based on polymer magnets. IEEE Transactions on Magnetics 43(10):3891–3895
FeldmannM,Waldschik A, Büttgenbach S (2007) Electromagnetic micro actuators, micro motors, and micro robots. In: Proc. of SPIE, vol 6798, pp 11/1–11/10
Feldmann M, Waldschik A, Büttgenbach S (2008) Synchronous micro motors: concept, fabrication and test. In: Proc. of Actuator 2008, pp 669–672
Feldmann M, Waldschik A, Ruffert C, Gatzen H, Büttgenbach S (2008) Fabrication of drive and guide components for micro motors. Microsystem Technologies 14(12):1941–1947
GehrkingR, Demmig S, PonickB, FeldmannM, Büttgenbach S (2006) A micro linear motor with integrated passive magnetic guidance. In: 32nd Annual Conference on IEEE Industrial Electronics, pp 1245–1250
Seidemann V, Edler J, Büttgenbach S, Stölting H (2003) Linear variable reluctance (VR) micro motor with horizontal flux guidance: concept, simulation, fabrication and test. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, vol 2, pp 1415–1418
Seidemann V, Kohlmeier T, Föhse M, Gatzen H, Büttgenbach S (2004) High aspect ratio spiral and vertical meander micro coils for actuator applications. Microsystem Technologies 10(6):564–570
Waldschik A, Büttgenbach S (2010) Micro gear pump with internal electromagnetic drive. Microsystem Technologies 16(8):1581–1587
Waldschik A, Feldmann M, Büttgenbach S (2008) Novel synchronous linear and rotatory micro motors based on polymer magnets with organic and inorganic insulation layers. Sensors & Transducers Journal, Special Issue on Microsystems: Technology and Applications 3:3–13
Waldschik A, Feldmann M, Büttgenbach S (2008) Rotary variable reluctance (VR) micro motors: concept, simulation, fabrication and test. In: Proc. of Actuator 2008, pp 453–456
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Waldschik, A., Feldmann, M., Seidemann, V., Büttgenbach, S. (2011). Development and Fabrication of Electromagnetic Microactuators. In: Büttgenbach, S., Burisch, A., Hesselbach, J. (eds) Design and Manufacturing of Active Microsystems. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-12903-2_12
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DOI: https://doi.org/10.1007/978-3-642-12903-2_12
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