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Part of the book series: Microtechnology and MEMS ((MEMS))

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Abstract

Depending on whether electrical or magnetic quantities are associated with mechanical quantities, in Chap. 7 it has been demonstrated that electromechanical interactions can be described by two basic types of transducers namely the electrical and magnetic transducer. The electrostatic and piezoelectric transducer belong to the group of electrical transducers.

With the electrostatic transducer, the electromechanical coupling is provided between moving electrodes – plates or diaphragms – of a capacitor comprising an isotropic dielectric. With the piezoelectric transducer, the coupling is provided within an anisotropic dielectric of a solid.

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Lenk, A., Ballas, R.G., Werthschützky, R., Pfeifer, G. (2011). Electrical Transducers. In: Electromechanical Systems in Microtechnology and Mechatronics. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-10806-8_9

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