Abstract
This chapter describes the structural and morphological characteristics of planar nonpolar and semipolar GaN films grown by hydride vapor phase epitaxy (HVPE). While smooth enough to allow device regrowth and fabrication, these films often contain ∼1010cm−2 threading dislocations and ∼105cm−1 basal plane stacking faults. Lateral epitaxial overgrowth (LEO) has been developed to largely eliminate dislocations and stacking faults in the overgrown material, resulting in significant improvements in surface morphology and luminescence characteristics of these films and optoelectronic devices grown upon them.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
H.P. Maruska, L.J. Anderson, D.A. Stevenson, J. Electrochem. Soc. 121, 1202 (1974)
M. Sano, M. Aoki, Jpn. J. Appl. Phys. 15(10), 1943 (1976)
A. Shintani, S. Minagawa, J. Electrochem. Soc. 123(10), 1575 (1976)
R. Madar, D. Michel, et al., J. Cryst. Growth 40, 239 (1977)
T. Sasaki, S. Zembutsu, J. Appl. Phys. 61(7), 2533 (1987)
T. Lei, K.F. Ludwig Jr., T.D. Moustakas, J. Appl. Phys. 74(7), 4430 (1993)
W.A. Melton, J.I. Pankove, J. Cryst. Growth 178, 168 (1997)
R.J. Molnar, Hydride Vapor Phase Epitaxial Growth of III–V Nitrides, in Semiconductors and Semimetals, Vol. 57. (New York, Elsevier Science and Technology Books, 1999), pp. 1–31
P. Waltereit, O. Brandt, et al., Nature 406, 865 (2000)
M.D. Craven, S.H. Lim, et al., Appl. Phys. Lett. 81(3), 469 (2002)
P. Kung, C. J. Sun, et al., J. Appl. Phys. 75(9), 4515 (1994)
B. A. Haskell, F. Wu, et al., Appl. Phys. Lett. 83(8), 1554 (2003)
T. Paskova, P.P. Paskov, et al., Phys. Stat. Sol. (A) 183(1), 197 (2001)
A. Shintani, S. Minagawa, J. Electrochem. Soc. 123(10), 1575 (1976)
R. Molnar, Hydride Vapor Phase Epitaxial Growth of III-V Nitrides, in Semiconductors and Semimetals, vol. 57 (Gallium Nitride II, ed. by T.D. Moustakas and J.I. Pankove, San Diego: Academic Press, 1999). pp. 1–31
E.V. Etzkorn, D.R. Clarke, J. Appl. Phys. 82(2), 1025 (2001)
T. Böttcher, S. Einfeldt, et al., Appl. Phys. Lett. 78(14), 1976 (2001)
H. Marchand, J. Ibbetson et al., MRS Internet J. Nitride Semicond. Res. 3, 3 (1998)
M. D. Craven, S. H. Lim, et al., Appl. Phys. Lett. 81(3), 469 (2002)
D.N. Zakharov, Z. Lilienthal-Weber, et al., Mat. Res. Soc. Symp. Proc. 798, Y5.28.1–6 (2004)
R. Armitage, H. Hirayama, Appl. Phys. Lett. 92, 092121 (2008)
T. Wei, R. Duan, et al., Jpn. J. Appl. Phys. 47(5), 3346 (2008)
O. Brandt, Y. J. Sun, et al., Phys. Rev. B 69, 165326 (2004)
B. Haskell, A. Chakraborty, et al., J. Electr. Mater. 34(4) 357–360 (2005)
X. Xu, R.P. Vaudo, et al., J. Cryst. Growth 246, 223–229 (2002)
A.E. Romanov, T.J. Baker, et al., J. Appl. Phys. 100, 023522 (2006)
X.H. Wu, C.R. Elsass, et al., Appl. Phys. Lett. 72(6), 692 (1998)
H. Marchand, J.P. Ibbetson, et al., J. Cryst. Growth 195, 328–332 (1998)
T.J. Baker, Ph.D. Dissertation, U.C. Santa Barbara (2006)
T.J. Baker, B.A. Haskell, et al., Jpn. J. Appl. Phys. 44(29), L920–L922 (2005)
B.A. Haskell, Ph.D. Dissertation, U.C. Santa Barbara (2005)
B.A. Haskell, F. Wu, et al., Appl. Phys. Lett. 83(4), 644 (2003)
M.D. Craven, S.H. Lim, et al., Appl. Phys. Lett. 81(7), 1201 (2002)
B.M. Imer, F. Wu, S.P. DenBaars, J.S. Speck, Appl. Phys. Lett. 88, 061908 (2006)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2010 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Fini, P.T., Haskell, B.A. (2010). Nonpolar and Semipolar GaN Growth by HVPE. In: Ehrentraut, D., Meissner, E., Bockowski, M. (eds) Technology of Gallium Nitride Crystal Growth. Springer Series in Materials Science, vol 133. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-04830-2_5
Download citation
DOI: https://doi.org/10.1007/978-3-642-04830-2_5
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-04828-9
Online ISBN: 978-3-642-04830-2
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)