Adaptive Fuzzy Logic Controller and Its Application in MEMS Mirror Actuation Feedback Control

  • Weiwei Shan
  • Xiqun Zhu
  • Yuan Ma
Part of the Lecture Notes in Computer Science book series (LNCS, volume 5788)


To overcome the open-loop control drawbacks of electrostatic actuated MEMS mirror, intelligent control - fuzzy logic control – is introduced in the closed-loop feedback control for the first time to improve both static and dynamic performance. Furthermore, to enhance the robustness of the mirror actuation system, variable universe adaptive fuzzy logic controller (VFLC) is introduced in the feedback control to overcome the uncertainties such as MEMS fabrication process drifting and non-ideal working conditions. VFLC in feedback control can effectively control mirror with fast switching, no or little overshoot, little vibration, and fine positioning.


Fuzzy logic controller variable universe feedback control MEMS mirror electrostatic actuation 


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Copyright information

© Springer-Verlag Berlin Heidelberg 2009

Authors and Affiliations

  • Weiwei Shan
    • 1
  • Xiqun Zhu
    • 2
  • Yuan Ma
    • 2
  1. 1.National ASIC System Engineering Research CenterSoutheast UniversityNanjingChina
  2. 2.Electrical and Computer Engineering DepartmentUniversity of MarylandCollege ParkUSA

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