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Adaptive Fuzzy Logic Controller and Its Application in MEMS Mirror Actuation Feedback Control

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Intelligent Data Engineering and Automated Learning - IDEAL 2009 (IDEAL 2009)

Part of the book series: Lecture Notes in Computer Science ((LNISA,volume 5788))

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Abstract

To overcome the open-loop control drawbacks of electrostatic actuated MEMS mirror, intelligent control - fuzzy logic control – is introduced in the closed-loop feedback control for the first time to improve both static and dynamic performance. Furthermore, to enhance the robustness of the mirror actuation system, variable universe adaptive fuzzy logic controller (VFLC) is introduced in the feedback control to overcome the uncertainties such as MEMS fabrication process drifting and non-ideal working conditions. VFLC in feedback control can effectively control mirror with fast switching, no or little overshoot, little vibration, and fine positioning.

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References

  1. Chu, P.B., Lee, S.S., Park, S.: MEMS: The Path to Large Optical Crossconnects. IEEE Communication magazine 40(3), 80–87 (2002)

    Article  Google Scholar 

  2. Degani, O., et al.: Pull-in Study of an Electrostatic Torsion Microactuator. IEEE J. Microelectromech. Syst. 7(4), 373–379 (1998)

    Article  Google Scholar 

  3. Chen, J.H., et al.: Tilt-Angle Stabilization of Electrostatically Actuated Micromechanical Mirrors Beyond the Pull-in Point. IEEE J. Microelectromech. Syst. 13(6), 988–997 (2004)

    Article  Google Scholar 

  4. Chen, K.S., Ou, K.S.: Command-Shaping Techniques for Electrostatic MEMS Actuation. IEEE J. Microelectromech. Syst. 16(3), 537–549 (2007)

    Article  Google Scholar 

  5. Li, H.X., Miao, Z.H., Lee, E.S.: Variable Universe Stable Adaptive Fuzzy Control of a Nonlinear System. Computers and Mathematics with Applications 44(5-6), 799–815 (2002)

    Article  MathSciNet  MATH  Google Scholar 

  6. Shan, W.W., Ma, Y., Newcomb, R., Jin, D.M.: Analog Circuit Implementation of a Variable Universe Adaptive Fuzzy Logic Controller. IEEE Trans. Circuits Syst. II: Brief Paper 55(10), 976–980 (2008)

    Article  Google Scholar 

  7. Shan, W.W., Jin, D.M., et al.: VLSI Implementation of a Self-tuning Fuzzy Controller Based on Variable Universe of Discourse. In: Wang, L., Jin, Y. (eds.) FSKD 2005. LNCS (LNAI), vol. 3613, pp. 1044–1052. Springer, Heidelberg (2005)

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Author information

Authors and Affiliations

  1. National ASIC System Engineering Research Center, Southeast University, Nanjing, 210096, China

    Weiwei Shan

  2. Electrical and Computer Engineering Department, University of Maryland, College Park, MD 20742, USA

    Xiqun Zhu & Yuan Ma

Authors
  1. Weiwei Shan
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  2. Xiqun Zhu
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  3. Yuan Ma
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Editor information

Editors and Affiliations

  1. Escuela Politécnica Superior, Universidad de Burgos, Calle Francisco de Vitoria, S/N, Edifico C, 09006, Burgos, Spain

    Emilio Corchado

  2. School of Electrical and Electronic Engineering, University of Manchester, Sackville Street Building, Sackville Street, M60 1QD, Manchester, UK

    Hujun Yin

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© 2009 Springer-Verlag Berlin Heidelberg

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Shan, W., Zhu, X., Ma, Y. (2009). Adaptive Fuzzy Logic Controller and Its Application in MEMS Mirror Actuation Feedback Control. In: Corchado, E., Yin, H. (eds) Intelligent Data Engineering and Automated Learning - IDEAL 2009. IDEAL 2009. Lecture Notes in Computer Science, vol 5788. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-04394-9_10

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  • DOI: https://doi.org/10.1007/978-3-642-04394-9_10

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-04393-2

  • Online ISBN: 978-3-642-04394-9

  • eBook Packages: Computer ScienceComputer Science (R0)

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