Adaptive Fuzzy Logic Controller and Its Application in MEMS Mirror Actuation Feedback Control
To overcome the open-loop control drawbacks of electrostatic actuated MEMS mirror, intelligent control - fuzzy logic control – is introduced in the closed-loop feedback control for the first time to improve both static and dynamic performance. Furthermore, to enhance the robustness of the mirror actuation system, variable universe adaptive fuzzy logic controller (VFLC) is introduced in the feedback control to overcome the uncertainties such as MEMS fabrication process drifting and non-ideal working conditions. VFLC in feedback control can effectively control mirror with fast switching, no or little overshoot, little vibration, and fine positioning.
KeywordsFuzzy logic controller variable universe feedback control MEMS mirror electrostatic actuation
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