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Laser-Surface Interactions for New Materials Production pp 141–175Cite as

UV Laser Ablation of Polymers: From Structuring to Thin Film Deposition

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Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 130))

Summary

UV laser ablation of polymers is a versatile method to structure polymers with high resolution. The mechanism of ablation is often discussed controversially, but it is necessary to keep in mind that polymers are complex systems with a wide variety of properties that can influence the ablation mechanism. Analyzing the data, it appears that the ablation mechanism is a complex interrelated system, where photochemical and photothermal reactions are very important. The pressure jump, which is associated with the creation of small molecules and originates from both types of reaction, is also important for ablation. The importance of each effect is strongly dependent on the type of polymer, the laser wavelengths, the pulse length, and the substrate. UV laser ablation can also be utilized to deposit directly thin polymer films by PLD, but this is limited to certain polymers. Alternative laser-based techniques (LIFT) utilize the decomposition of a thin layer to transfer complete layers with high spatial resolution. This approach can be used to transfer pixels of sensitive materials to a substrate with a minimal thermal and UV load.

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References

  1. R. Srinivasan, V. Mayne-Banton, Appl. Phys. Lett. 41, 576 (1982)

    Article  ADS  Google Scholar 

  2. Y. Kawamura, K. Toyoda, S. Namba, Appl. Phys. Lett. 40, 374 (1982)

    Article  ADS  Google Scholar 

  3. R. Srinivasan, B. Braren, Chem. Rev. 89, 1303 (1989)

    Article  Google Scholar 

  4. D. Bäuerle, Laser Processing and Chemistry, 3rd edn. (Springer Verlag, Berlin, 2000)

    Google Scholar 

  5. S. Lazare, V. Granier, Laser Chem. 10, 25 (1989)

    Article  Google Scholar 

  6. T. Lippert, J.T. Dickinson, Chem. Rev. 103, 453 (2003)

    Article  Google Scholar 

  7. T. Lippert, in Polymers and Light, vol. 168, ed. by T. Lippert (Springer, Berlin, 2004) p. 51

    Google Scholar 

  8. P.E. Dyer, in Photochemical Processing of Electronic Materials, ed. by I.W. Boyd, R.B. Jackman (Academic, London, 1992) p. 360

    Google Scholar 

  9. N. Bityurin, B.S. Luk’yanchuk, M.H. Hong, T.C. Chong, Chem. Rev. 103, 519 (2003)

    Article  Google Scholar 

  10. T. Lippert, Plasma Process. Polym. 2, 525 (2005)

    Article  Google Scholar 

  11. N. Bityurin, Annu. Rep. Progr. Chem. C 101, 216 (2005)

    Article  Google Scholar 

  12. M. Karas, D. Bachmann, F. Hillenkamp, Anal. Chem. 57, 2935 (1985)

    Article  Google Scholar 

  13. R. Zenobi, R. Knochenmuss, Mass Spectrom. Rev. 17, 337 (1998)

    Article  Google Scholar 

  14. L.J. Radziemski, D.A. Cremers, Laser-Induced Plasmas and Applications (M. Dekker, New York, 1989)

    Google Scholar 

  15. G.B. Blanchet, Macromolecules 28, 4603 (1995)

    Article  ADS  Google Scholar 

  16. G.B. Blanchet, Chemtech 26, 31 (1996)

    Google Scholar 

  17. W.B. Jiang, M.G. Norton, L. Tsung, J.T. Dickinson, J. Mater. Res. 10, 1038 (1995)

    Article  ADS  Google Scholar 

  18. R.W. Eason, Pulsed Laser Deposition of Thin Films: Applications-Led Growth of Functional Materials (John Wiley, Hoboken, NJ, 2007)

    Google Scholar 

  19. D.B. Chrisey, G.K. Hubler, Pulsed Laser Deposition of Thin Films (John Wiley, New York, 1994)

    Google Scholar 

  20. A. Pique, P. Wu, B.R. Ringeisen, D.M. Bubb, J.S. Melinger, R.A. McGill, D.B. Chrisey, Appl. Surf. Sci. 186, 408 (2002)

    Article  ADS  Google Scholar 

  21. J. Bohandy, B.F. Kim, F.J. Adrian, J. Appl. Phys. 60, 1538 (1986)

    Article  ADS  Google Scholar 

  22. K.D. Kyrkis, A.A. Andreadaki, D.G. Papazoglou, I. Zergioti, in Recent Advances in Laser Processing of Materials, vol. 241, ed. by J. Perrière, E. Millon, E. Fogarassy (Elsevier, Amsterdam, 2006) p. 213

    Google Scholar 

  23. H. Aoki (U.S. Patent 5736999, 1998)

    Google Scholar 

  24. R.S. Patel, T.A. Wassick, Proc. SPIE-Int. Soc. Opt. Eng. 2991, 217 (1997)

    ADS  Google Scholar 

  25. G. Kopitkovas, L. Urech, T. Lippert, in Recent Advances in Laser Processing of Materials, ed. by E. Millon, J. Perriere, E. Fogarassy (Elsevier, Kidlington, 2006) p. 105

    Google Scholar 

  26. H. Klank, J.P. Kutter, O. Geschke, Lab Chip 2, 242–246 (2002)

    Article  Google Scholar 

  27. D. Snakenborg, H. Klank, J.P. Kutter, J. Micromech. Microeng. 14, 182 (2004)

    Article  ADS  Google Scholar 

  28. D. Gomez, F. Tekniker, I. Goenaga, I. Lizuain, M. Ozaita, Opt. Eng. 44, 051105 (2005)

    Article  ADS  Google Scholar 

  29. D.F. Farson, H.W. Choi, C.M. Lu, L.J. Lee, J. Laser Appl. 18, 210 (2006)

    Article  Google Scholar 

  30. S. Lazare, W.P. Guan, D. Drilhole, Appl. Surf. Sci. 96–98, 605 (1996)

    Article  Google Scholar 

  31. E.E. Ortelli, F. Geiger, T. Lippert, J. Wei, A. Wokaun, Macromolecules 33, 5090 (2000)

    Article  ADS  Google Scholar 

  32. P. Lemoine, W. Blau, A. Drury, C. Keely, Polymer 34, 5020 (1993)

    Article  Google Scholar 

  33. T. Lippert, A. Wokaun, J. Stebani, O. Nuyken, J. Ihlemann, Angew. Makromol. Chem. 213, 127 (1993)

    Article  Google Scholar 

  34. G. Bounos, A. Selimis, S. Georgiou, E. Rebollar, M. Castillejo, N. Bityurin, J. Appl. Phys. 100, 114323 (2006)

    Article  ADS  Google Scholar 

  35. E. Rebollar, G. Bounos, M. Oujja, S. Georgiou, M. Castillejo, J. Phys. Chem. B 110, 16452 (2006)

    Article  Google Scholar 

  36. R. Srinivasan, J. Appl. Phys. 70, 7588 (1991)

    Article  ADS  Google Scholar 

  37. R. Srinivasan, B. Braren, Appl. Phys. A 45, 289 (1988)

    Article  ADS  Google Scholar 

  38. P.E. Dyer, S.D. Jenkins, J. Sidhu, Appl. Phys. Lett. 52, 1880 (1988)

    Article  ADS  Google Scholar 

  39. P.E. Dyer, S.D. Jenkins, J. Sidhu, Appl. Phys. Lett. 49, 453 (1986)

    Article  ADS  Google Scholar 

  40. J. Wei, N. Hoogen, T. Lippert, O. Nuyken, A. Wokaun, J. Phys. Chem. B 105, 1267 (2001)

    Article  Google Scholar 

  41. F. Raimondi, S. Abolhassani, R. Brutsch, F. Geiger, T. Lippert, J. Wambach, J. Wei, A. Wokaun, J. Appl. Phys. 88, 3659 (2000)

    Article  ADS  Google Scholar 

  42. J. Krüger, W. Kautek, in Polymers And Light, vol. 168, ed. by T. Lippert (Springer, Berlin, 2004) p. 247

    Google Scholar 

  43. T. Dumont, R. Bischofberger, T. Lippert, A. Wokaun, Appl. Surf. Sci. 247, 115 (2005)

    Article  ADS  Google Scholar 

  44. T. Dumont, S. Lazare, T. Lippert, A. Wokaun, Appl. Phys. A 79, 1271 (2004)

    Article  ADS  Google Scholar 

  45. R. Srinivasan, B. Braren, D.E. Seeger, R.W. Dreyfus, Macromolecules 19, 916 (1986)

    Article  ADS  Google Scholar 

  46. R. Srinivasan, J. Appl. Phys. 73, 2743 (1993)

    Article  ADS  Google Scholar 

  47. J.E. Andrew, P.E. Dyer, D. Forster, P.H. Key, Appl. Phys. Lett. 43, 717 (1983)

    Article  ADS  Google Scholar 

  48. R. Srinivasan, B. Braren, J. Polym. Sci. A Polym. Chem. 22, 2601 (1984)

    ADS  Google Scholar 

  49. R. Srinivasan, B. Braren, K.G. Casey, J. Appl. Phys. 68, 1842 (1990)

    Article  ADS  Google Scholar 

  50. S. Küper, M. Stuke, Appl. Phys. A 49, 211 (1989)

    Article  ADS  Google Scholar 

  51. S.V. Babu, G.C. D’Couto, F.D. Egitto, J. Appl. Phys. 72, 692 (1992)

    Article  ADS  Google Scholar 

  52. M. Himmelbauer, E. Arenholz, D. Bauerle, Appl. Phys. A 63, 87 (1996)

    ADS  Google Scholar 

  53. G. Paraskevopoulos, D.L. Singleton, R.S. Irwin, R.S. Taylor, J. Appl.Phys. 70, 1938 (1991)

    Article  ADS  Google Scholar 

  54. R.S. Taylor, D.L. Singleton, G. Paraskevopoulos, Appl. Phys. Lett. 50, 1779 (1987)

    Article  ADS  Google Scholar 

  55. S. Küper, J. Brannon, K. Brannon, Appl. Phys. A 56, 43 (1993)

    Article  ADS  Google Scholar 

  56. S.R. Cain, J. Phys. Chem. 97, 7572 (1993)

    Article  Google Scholar 

  57. S.R. Cain, F.C. Burns, C.E. Otis, J. Appl. Phys. 71, 4107 (1992)

    Article  ADS  Google Scholar 

  58. G.C. D’Couto, S.V. Babu, J. Appl. Phys. 76, 3052 (1994)

    Article  ADS  Google Scholar 

  59. B. Lukyanchuk, N. Bityurin, M. Himmelbauer, N. Arnold, Nucl. Instrum. Methods Phys. Res. B 122, 347 (1997)

    Article  ADS  Google Scholar 

  60. N. Arnold, B. Luk’yanchuk, N. Bityurin, Appl. Surf. Sci. 129, 184 (1998)

    Article  Google Scholar 

  61. T.F. Deutsch, M.W. Geis, J. Appl. Phys. 54, 7201 (1983)

    Article  ADS  Google Scholar 

  62. E. Sutcliffe, R. Srinivasan, J. Appl. Phys. 60, 3315 (1986)

    Article  ADS  Google Scholar 

  63. G.D. Mahan, H.S. Cole, Y.S. Liu, H.R. Philipp, Appl. Phys. Lett. 53, 2377 (1988)

    Article  ADS  Google Scholar 

  64. V. Srinivasan, M.A. Smrtic, S.V. Babu, J. Appl. Phys. 59, 3861 (1986)

    Article  ADS  Google Scholar 

  65. H. Schmidt, J. Ihlemann, B. Wolff-Rottke, K. Luther, J. Troe, J. Appl. Phys. 83, 5458 (1998)

    Article  ADS  Google Scholar 

  66. B. Lukyanchuk, N. Bityurin, S. Anisimov, N. Arnold, D. Bauerle, Appl. Phys. A 62, 397 (1996)

    Article  ADS  Google Scholar 

  67. B. Lukyanchuk, N. Bityurin, S. Anisimov, D. Bauerle, Appl. Phys. A 57, 367 (1993)

    Article  ADS  Google Scholar 

  68. N. Bityurin, A. Malyshev, B. Luk’yanchuk, S. Anisimov, D. Bäuerle, Proc. SPIE-Int. Soc. Opt. Eng. 2802, 103 (1996)

    ADS  Google Scholar 

  69. N. Bityurin, Appl. Surf. Sci. 139, 354 (1999)

    Article  ADS  Google Scholar 

  70. G.V. Treyz, R. Scarmozzino, R.M. Osgood, Appl. Phys. Lett. 55, 346 (1989)

    Article  ADS  Google Scholar 

  71. N. Arnold, N. Bityurin, Appl. Phys. A 68, 615 (1999)

    Article  ADS  Google Scholar 

  72. Y.G. Yingling, B.J. Garrison, J. Phys. Chem. B 109, 16482 (2005)

    Article  Google Scholar 

  73. Y.G. Yingling, B.J. Garrison, J. Phys. Chem. B 108, 1815 (2004)

    Article  Google Scholar 

  74. P.F. Conforti, M. Prasad, B.J. Garrison, Appl. Surf. Sci. 253, 6386 (2007)

    Article  ADS  Google Scholar 

  75. P.F. Conforti, M. Prasad, B.J. Garrison, J. Phys. Chem. C 111, 12024 (2007)

    Article  Google Scholar 

  76. M. Prasad, P.F. Conforti, B.J. Garrison, J. Appl. Phys. 101, 103113 (2007)

    Article  ADS  Google Scholar 

  77. M. Prasad, P.F. Conforti, B.J. Garrison, J. Chem. Phys. 127, 084705 (2007)

    Article  ADS  Google Scholar 

  78. M. Prasad, P.F. Conforti, B.J. Garrison, Y.G. Yingling, Appl. Surf. Sci. 253, 6382 (2007)

    Article  ADS  Google Scholar 

  79. Y.G. Yingling, B.J. Garrison, Appl. Surf. Sci. 253, 6377 (2007)

    Article  ADS  Google Scholar 

  80. Y.G. Yingling, L.V. Zhigilei, B.J. Garrison, J. Photochem. Photobiol. A Chem. 145, 173 (2001)

    Article  Google Scholar 

  81. L.V. Zhigilei, E. Leveugle, B.J. Garrison, Y.G. Yingling, M.I. Zeifman, Chem. Rev. 103, 321 (2003)

    Article  Google Scholar 

  82. Y.G. Yingling, B.J. Garrison, Chem. Phys. Lett. 364, 237 (2002)

    Article  ADS  Google Scholar 

  83. Y.G. Yingling, B.J. Garrison, Nucl. Instrum. Methods Phys. Res. B 202, 188 (2003)

    Article  ADS  Google Scholar 

  84. N. Bityurin, A. Malyshev, J. Appl. Phys. 92, 605 (2002)

    Article  ADS  Google Scholar 

  85. T. Lippert, A. Yabe, A. Wokaun, Adv. Mater. 9, 105 (1997)

    Article  Google Scholar 

  86. T. Lippert, J. Stebani, O. Nuyken, A. Stasko, A. Wokaun, J. Photochem. Photobiol. A Chem. 78, 139 (1994)

    Article  Google Scholar 

  87. O. Nuyken, J. Stebani, T. Lippert, A. Wokaun, A. Stasko, Macromol. Chem. Phys. 196, 751 (1995)

    Article  Google Scholar 

  88. A. Stasko, V. Adamcik, T. Lippert, A. Wokaun, J. Dauth, O. Nuyken, Makromol. Chem. Macromol. Chem. Phys. 194, 3385 (1993)

    Google Scholar 

  89. O. Nuyken, J. Stebani, T. Lippert, A. Wokaun, A. Stasko, Macromol. Chem. Phys. 196, 739 (1995)

    Article  Google Scholar 

  90. T. Lippert, L.S. Bennett, T. Nakamura, H. Niino, A. Ouchi, A. Yabe, Appl. Phys. A 63, 257 (1996)

    Article  ADS  Google Scholar 

  91. T. Lippert, T. Nakamura, H. Niino, A. Yabe, Appl. Surf. Sci. 110, 227 (1997)

    Article  Google Scholar 

  92. T. Lippert, C. David, J.T. Dickinson, M. Hauer, U. Kogelschatz, S.C. Langford, O. Nuyken, C. Phipps, J. Robert, A. Wokaun, J. Photochem. Photobiol. A Chem. 145, 145 (2001)

    Article  Google Scholar 

  93. T. Lippert, A. Wokaun, S.C. Langford, J.T. Dickinson, Appl. Phys. A 69, S655 (1999)

    Article  ADS  Google Scholar 

  94. T. Lippert, S.C. Langford, A. Wokaun, G. Savas, J.T. Dickinson, J. Appl. Phys. 86, 7116 (1999)

    Article  ADS  Google Scholar 

  95. M. Hauer, J.T. Dickinson, S. Langford, T. Lippert, A. Wokaun, Appl. Surf. Sci. 197, 791 (2002)

    Article  ADS  Google Scholar 

  96. H. Furutani, H. Fukumura, H. Masuhara, J. Phys. Chem. 100, 6871 (1996)

    Article  Google Scholar 

  97. H. Furutani, H. Fukumura, H. Masuhara, S. Kambara, T. Kitaguchi, H. Tsukada, T. Ozawa, J. Phys. Chem. B 102, 3395 (1998)

    Article  Google Scholar 

  98. T. Lippert, J.T. Dickinson, M. Hauer, G. Kopitkovas, S.C. Langford, H. Masuhara, O. Nuyken, J. Robert, H. Salmio, T. Tada, K. Tomita, A. Wokaun, Appl. Surf. Sci. 197, 746 (2002)

    Article  ADS  Google Scholar 

  99. M. Hauer, D.J. Funk, T. Lippert, A. Wokaun, Appl. Surf. Sci. 208, 107–112 (2003)

    Article  ADS  Google Scholar 

  100. J. Bonse, S.M. Wiggins, J. Solis, T. Lippert, Appl. Surf. Sci. 247, 440 (2005)

    Article  ADS  Google Scholar 

  101. J. Bonse, S.M. Wiggins, J. Solis, T. Lippert, H. Sturm, Appl. Surf. Sci. 248, 157 (2005)

    Article  ADS  Google Scholar 

  102. E.C. Buruiana, T. Buruiana, H. Lenuta, T. Lippert, L. Urech, A. Wokaun, J. Polym. Sci. A Polym. Chem. 44, 5271 (2006)

    Article  ADS  Google Scholar 

  103. E.C. Buruiana, L. Hahui, T. Buruiana, L. Urech, T. Lippert, J. Photochem. Photobiol. A Chem. 195, 337 (2008)

    Article  Google Scholar 

  104. E.C. Buruiana, V. Melinte, T. Buruiana, T. Lippert, H. Yoshikawa, H. Mashuhara, J. Photochem. Photobiol. A Chemistry 171, 261 (2005)

    Article  Google Scholar 

  105. R. Fardel, M. Nagel, T. Lippert, F. Nuesch, A. Wokaun, B.S. Luk’yanchuk, Appl. Phys. A 90, 661 (2008)

    Article  ADS  Google Scholar 

  106. G. Paltauf, P.E. Dyer, Chem. Rev. 103, 487 (2003)

    Article  Google Scholar 

  107. D.E. Hare, D.D. Dlott, Appl. Phys. Lett. 64, 715 (1994)

    Article  ADS  Google Scholar 

  108. D.E. Hare, J. Franken, D.D. Dlott, J. Appl. Phys. 77, 5950 (1995)

    Article  ADS  Google Scholar 

  109. C.B. Arnold, P. Serra, A. Piqué, MRS Bull. 32, 23 (2007)

    Google Scholar 

  110. D.B. Chrisey, A. Pique, R.A. McGill, J.S. Horwitz, B.R. Ringeisen, D.M. Bubb, P.K. Wu, Chem. Rev. 103, 553 (2003)

    Article  Google Scholar 

  111. X. Yang, Y. Tang, M. Yu, Q. Qin, Thin Solid Films 358, 187 (2000)

    Article  ADS  Google Scholar 

  112. B. Losekrug, A. Meschede, H.U. Krebs, Appl. Surf. Sci. 254, 1312 (2007)

    Article  ADS  Google Scholar 

  113. E. Suske, T. Scharf, H.U. Krebs, T. Junkers, M. Buback, J. Appl. Phys. 100, 014906 (2006)

    Article  ADS  Google Scholar 

  114. D.B. Chrisey, A. Pique, J. Fitz-Gerald, R.C.Y. Auyeung, R.A. McGill, H.D. Wu, M. Duignan, Appl. Surf. Sci. 154, 593 (2000)

    Article  ADS  Google Scholar 

  115. C. Germain, L. Charron, L. Lilge, Y.Y. Tsui, Appl. Surf. Sci. 253, 8328 (2007)

    Article  ADS  Google Scholar 

  116. A. Klini, A. Mourka, V. Dinca, C. Fotakis, F. Claeyssens, Appl. Phys. A 87, 17 (2007)

    Article  ADS  Google Scholar 

  117. H. Fukumura: J. Photochem. Photobiol. A Chem. 106, 3 (1997)

    Article  Google Scholar 

  118. H. Fukumura, Y. Kohji, K. Nagasawa, H. Masuhara, J. Am. Chem. Soc. 116, 10304 (1994)

    Article  Google Scholar 

  119. D.M. Karnakis, T. Lippert, N. Ichinose, S. Kawanishi, H. Fukumura, Appl. Surf. Sci. 129, 781 (1998)

    Article  Google Scholar 

  120. J.Y. Lee, S.T. Lee, Adv. Mater. 16, 51 (2004)

    Article  Google Scholar 

  121. H.P. Le, J. Imaging Sci. Technol. 42, 49 (1998)

    Google Scholar 

  122. F. Pschenitzka, J.C. Sturm, Appl. Phys. Lett. 74, 1913 (1999)

    Article  ADS  Google Scholar 

  123. D.B. Chrisey, A. Piqué, J. Fitz-Gerald, R.C.Y. Auyeung, R.A. McGill, H.D. Wu, M. Duignan, Appl. Surf. Sci. 154–155, 593 (2000)

    Article  Google Scholar 

  124. J.M. Fitz-Gerald, H.D. Wu, A. Pique, J.S. Horwitz, R.C.Y. Auyeung, W. Chang, W.J. Kim, D.B. Chrisey, Integrated Ferroelectrics 29, 13 (2000)

    Article  Google Scholar 

  125. A. Pique, D.B. Chrisey, R.C.Y. Auyeung, J. Fitz-Gerald, H.D. Wu, R.A. McGill, S. Lakeou, P.K. Wu, V. Nguyen, M. Duignan, Appl. Phys. A 69, S279 (1999)

    Article  ADS  Google Scholar 

  126. A. Pique, R.A. McGill, D.B. Chrisey, D. Leonhardt, T.E. Mslna, B.J. Spargo, J.H. Callahan, R.W. Vachet, R. Chung, M.A. Bucaro, Thin Solid Films 356, 536 (1999)

    Article  Google Scholar 

  127. D.B. Chrisey, A. Pique, R. Modi, H.D. Wu, R.C.Y. Auyeung, H.D. Young, Appl. Surf. Sci. 168, 345 (2000)

    Article  ADS  Google Scholar 

  128. D. Young, R.C.Y. Auyeung, A. Pique, D.B. Chrisey, D.D. Dlott, Appl. Phys. Lett. 78, 3169 (2001)

    Article  ADS  Google Scholar 

  129. S.G. Koulikov, D.D. Dlott, J. Imaging Sci. Technol. 44, 111 (2000)

    Google Scholar 

  130. I.Y.S. Lee, W.A. Tolbert, D.D. Dlott, M.M. Doxtader, D.M. Foley, D.R. Arnold, E.W. Ellis, J. Imaging Sci. Technol. 36, 180 (1992)

    Google Scholar 

  131. W.A. Tolbert, I.Y.S. Lee, M.M. Doxtader, E.W. Ellis, D.D. Dlott, J. Imaging Sci. Technol. 37, 411 (1993)

    Google Scholar 

  132. W.A. Tolbert, I.YS. Lee, X.N. Wen, D.D. Dlott, M.M. Doxtader, E.W. Ellis, J. Imaging Sci. Technol. 37, 485 (1993)

    Google Scholar 

  133. G.R. Pinto, J. Imaging Sci. Technol. 38, 565 (1994)

    Google Scholar 

  134. J.M. Fernandez-Pradas, M. Colina, P. Serra, J. Dominguez, J.L. Morenza, Thin Solid Films 453, 27 (2004)

    Article  ADS  Google Scholar 

  135. P. Serra, M. Colina, J.M. Fernandez-Pradas, L. Sevilla, J.L. Morenza, Appl. Phys. Lett. 85, 1639 (2004)

    Article  ADS  Google Scholar 

  136. P. Serra, J.M. Fernandez-Pradas, F.X. Berthet, M. Colina, J. Elvira, J.L. Morenza, Appl. Phys. A 79, 949 (2004)

    ADS  Google Scholar 

  137. V. Dinca, E. Kasotakis, J. Catherine, A. Mourka, A. Mitraki, A. Popescu, M. Dinescu, M. Farsari, C. Fotakis, Appl. Surf. Sci. 254, 1160 (2007)

    Article  ADS  Google Scholar 

  138. B. Hopp, T. Smausz, N. Kresz, N. Barna, Z. Bor, L. Kolozsvari, D.B. Chrisey, A. Szabo, A. Nogradi, Tissue Eng. 11, 1817 (2005)

    Article  Google Scholar 

  139. B. Hopp, T. Smausz, Z. Antal, N. Kresz, Z. Bor, D.B. Chrisey, J. Appl. Phys. 96, 3478 (2004)

    Article  ADS  Google Scholar 

  140. B. Hopp, T. Smausz, N. Barna, C. Vass, Z. Antal, L. Kredics, D.B. Chrisey, J. Phys. D Appl. Phys. 38, 833 (2005)

    Article  ADS  Google Scholar 

  141. T. Smausz, B. Hopp, G. Kecskeméti, Z. Bor, Appl. Surf. Sci. 252, 4738 (2006)

    Article  ADS  Google Scholar 

  142. J.A. Barron, D.B. Krizman, B.R. Ringeisen, Ann. Biomed. Eng. 33, 121 (2005)

    Article  Google Scholar 

  143. J.A. Barron, R. Rosen, J. Jones-Meehan, B.J. Spargo, S. Belkin, B.R. Ringeisen, Biosens Bioelectron 20, 246 (2004)

    Article  Google Scholar 

  144. J.A. Barron, B.J. Spargo, B.R. Ringeisen, Appl. Phys. A 79, 1027 (2004)

    Article  ADS  Google Scholar 

  145. J.A. Barron, P. Wu, H.D. Ladouceur, B.R. Ringeisen, Biomed. Microdevices 6, 139 (2004)

    Article  Google Scholar 

  146. J.A. Barron, H.D. Young, D.D. Dlott, M.M. Darfler, D.B. Krizman, B.R. Ringeisen, Proteomics 5, 4138 (2005)

    Article  Google Scholar 

  147. N.T. Kattamis, P.E. Purnick, R. Weiss, C.B. Arnold, Appl. Phys. Lett. 91, 171120 (2007)

    Article  ADS  Google Scholar 

  148. T. Lippert, Adv. Polym. Sci. 168, 51 (2004)

    Google Scholar 

  149. D.P. Banks, K. Kaur, R. Gazia, R. Fardel, M. Nagel, T. Lippert, R.W. Eason, Europhys. Lett. 83, 38003 (2008)

    Article  ADS  Google Scholar 

  150. A. Doraiswamy, R.J. Narayan, T. Lippert, L. Urech, A. Wokaun, M. Nagel, B. Hopp, M. Dinescu, R. Modi, R.C.Y. Auyeung, D.B. Chrisey, Appl. Surf. Sci. 252, 4743 (2006)

    Article  ADS  Google Scholar 

  151. R. Fardel, M. Nagel, F. Nusch, T. Lippert, A. Wokaun, Appl. Surf. Sci. 254, 1322 (2007)

    Article  ADS  Google Scholar 

  152. R. Fardel, M. Nagel, F. Nuesch, T. Lippert, A. Wokaun, Appl. Phys. Lett. 91, 061103 (2007)

    Article  ADS  Google Scholar 

  153. M. Nagel, R. Fardel, P. Feurer, M. Häberli, F. Nüesch, T. Lippert, A. Wokaun, Appl. Phys. A 92, 781 (2008)

    Article  ADS  Google Scholar 

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Acknowledgements

Financial support of the Paul Scherrer Institut and the Swiss National Science Foundation to support parts of this work is gratefully acknowledged. Contributions from R. Fardel, M. Nagel, F. Nüesch, and L.Urech are also gratefully acknowledged.

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  1. General Energy Department, Paul Scherrer Institut, CH-5232, Villigen PSI, Switzerland

    Thomas Lippert

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  1. Dipto. Fisica , Universita di Trento, Via Sommarive 14, Povo, 38050, Italy

    Antonio Miotello

  2. Dipto. Ingegneria Nucleare, Politecnico di Milano, Via Ponzio 34-3, Milano, 20133, Italy

    Paolo M. Ossi

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Lippert, T. (2010). UV Laser Ablation of Polymers: From Structuring to Thin Film Deposition. In: Miotello, A., Ossi, P. (eds) Laser-Surface Interactions for New Materials Production. Springer Series in Materials Science, vol 130. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-03307-0_7

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