High Precision Object Phase Reconstruction with Modified Phase Retrieval

  • Sandro Förster
  • Herbert Gross
Chapter

The recovering of phase information out of intensity measurements through focus image stacks is an interesting topic for a long time. This so called phase retrieval avoids expensive and environmental sensitive direct phase measurement. The method is applicable to the imaging of phase objects [1], to the layout and optimization of phase structures for desired illumination distributions in beam shaping setups [2] and for metrology of systems [3]. The reconstruction of the phase is a nonlinear inverse problem and the corresponding computation is critical concerning convergence and accuracy. In the past a large variety of algorithms is proposed in the literature to deal with this problem [4], [5], [6], [7]. Usually, the performance of the algorithms can be improved, if several images are taken into account, which are diversified by at least one parameter. The most prominent and easiest choice to get information out of the system is to gather the images in several defocussed planes.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2009

Authors and Affiliations

  • Sandro Förster
    • 1
  • Herbert Gross
    • 1
  1. 1.Carl Zeiss AGOberkochenGermany

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