3-D Sensing for Microstructures Using Dynamic DOEs
Optical 3-D shape measurement technique based on fringe projection profilometry (FFP) has become one of the most popular methods in many application areas such as industrial inspection, robot vision, reverse engineering, to name just a few . In particular, a suitably designed FPP sensing technique is also applicable for the automatic inspection of microstructures. With FPP optical sensing technique, one is possibly able to achieve high throughput and high accuracy inspection with respect to 3D shape microstructures as used in microelectronics industry.
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This work is supported by the National Natural Science Foundation of China (grant 60775021), the Science & Technology Bureau of Shenzhen (grant 200734) and the Nanshan Scientific and Technology Project. The authors would like to thank Professor Wolfgang Osten, Professor Hans Tiziani, Dr. Tobias Haist, Dr. Klaus Körner and other colleagues at Institute of Applied Optics (ITO) of Stuttgart University for their helpful comments, suggestions and discussions.
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