Abstract
Sensor data fusion of active near infrared (NIR) and passive far infrared (FIR) for reliable detection of vulnerable road users in future warning automotive night vision systems requires for low-cost, mid-resolution FIR sensor arrays for hot spot detection. We present a new cost efficient technology for FIR arrays adopting a volume proven integrated MEMS process for the production of a suspended thermo-diode array. In contrast to established bolometer production all steps of the process developed are fully semiconductor compatible as the sensor element formation is an integral part of the read out IC processing and does not require ASIC backend processing with dedicated equipment. Vacuum wafer-level packaging compatibility further reduces cost. In a first step the proposed process has been verified with small integrated FIR arrays consisting of 42x28 pixels. The FIR array development reported is part of the EU FP7 project ‘ADOSE’.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
Akin, T., ‘CMOS-based Thermal Sensors’, Advanced Micro and Nanosystems, Vol 2, CMOS-MEMS, pp 479-512, Editors: H. Baltes, et. al., WILEY-VCH, ISBN: 3-527- 31080-0
Terre, W., et. al., ‘Microbolometer development and production at Indigo Systems’, Proc. SPIE, Vol. 5074, pp 518-526, 2003.
Tissot, J.L., et. al., ‘Un-cooled microbolometer detector: recent developments at Ulis’; Opto-electronics Review 14(1), pp 25-32
Kvisteroy, T., et. al., ‘Far Infrared Low-Cost Uncooled Bolometer for Automotive Use’, Advanced Microsystems for Automotive Applications 2007; pp 265-278, Editors: Jürgen Valldorf and Wolfgang Gessner, VDI, Springer Berlin (2007).
Kimata, M., et. al., ‘MEMS-based un-cooled infrared focal plane arrays’; Transducers & Eurosensors ’07, Lyon, pp 1357-1360 (2007).
Kimata, M., et. al., ‘SOI diode uncooled infrared focal plane arrays’, Proceedings SPIE, Vol. 6127, pp 61270X (2006).
Eminoglu, S., et. al., ‘A low cost 128x128 un-cooled infrared detector array in CMOS process’; J. Microelectromechanical Systems Vol. 17. No.1, p20-30, (2008).
Armbruster, S., et. al., ‘A novel micromachining process for the fabrication of mono-crystalline Si-membranes using porous silicon’, Digest Tech. Papers, Transducers 2003, June 2003, Boston, USA, pp 246-249 (2003).
Adam, B., et. al.; A New Micromechanical Pressure sensor for Automotive Airbag Applications’, Advanced Microsystems for Automotive Applications 2008; pp 259- 287, Editors: Jürgen Valldorf and Wolfgang Gessner, Springer Berlin (2007).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2009 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Reinhart, K., Eckardt, M., Herrmann, I., Feyh, A., Freund, F. (2009). Low-cost Approach for Far-Infrared Sensor Arrays for Hot-Spot Detection in Automotive Night Vision Systems. In: Meyer, G., Valldorf, J., Gessner, W. (eds) Advanced Microsystems for Automotive Applications 2009. VDI-Buch. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-00745-3_26
Download citation
DOI: https://doi.org/10.1007/978-3-642-00745-3_26
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-00744-6
Online ISBN: 978-3-642-00745-3
eBook Packages: EngineeringEngineering (R0)