In this chapter, we will give a qualitative description of a very simple discharge, will describe some experiments, and will evaluate the main parameters which determine the quality of a low-pressure discharge: plasma density, electron temperature, Debye length and plasma frequency. Eventually, a model is introduced which was originally derived by Langmuir and Mott- Smith and which is now known as the Global Model.
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© 2009 Springer-Verlag Berlin Heidelberg
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Franz, G. (2009). The plasma. In: Low Pressure Plasmas and Microstructuring Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-85849-2_3
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DOI: https://doi.org/10.1007/978-3-540-85849-2_3
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