Elastic collisions are of paramount importance for Ohmic heating and energy dissipation into the plasma; inelastic collisions are responsible for all the electronic excitation processes. For both processes, the deductive approach is chosen. By electronic and ionic impact, electrons can be released from surfaces; this process is required for the carrier avalanche in DC discharges, but has regained interest for stabilizing processes in production reactors whose inner surface is subject to various (mostly unintended) coating reactions.
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© 2009 Springer-Verlag Berlin Heidelberg
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Franz, G. (2009). Collisions and cross sections. In: Low Pressure Plasmas and Microstructuring Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-85849-2_2
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DOI: https://doi.org/10.1007/978-3-540-85849-2_2
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