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Nanotribology and Materials Characterization of MEMS/NEMS and BioMEMS/BioNEMS Materials and Devices

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Nanotribology and Nanomechanics

Abstract

Micro/nanoelectromechanical systems (MEMS/NEMS) need to be designed to perform their expected functions with short duration, typically in millisecond to picosecond timescales. Expected life of the devices for high-speed contacts can vary from a few hundred thousand to many billions of cycles, e.g., over a hundred billion cycles for digital micromirror devices (DMDs), which puts serious requirements on materials. For BioMEMS/BioNEMS, adhesion between biological molecular layers and the substrate, and friction and wear of biological layers may be important. There is a need for the development of a fundamental understanding of adhesion, friction/stiction, wear, and the role of surface contamination, and environment. Most mechanical properties are known to be scale-dependent. Therefore, the properties of nanoscale structures need to be measured. MEMS/NEMS materials need to exhibit good mechanical and tribological properties on the micro/nanoscale. There is a need to develop lubricants and identify lubrication methods that are suitable for MEMS/NEMS. Methods need to be developed to enhance adhesion between biomolecules and the device substrate. Component-level studies are required to provide a better understanding of tribological phenomena occurring in MEMS/NEMS. The emergence of micro/nanotribology and techniques based on atomic force microscopy has provided researchers with a viable approach to address these problems. This chapter presents a review of micro/nanoscale adhesion, friction, and wear studies of materials and lubrication studies for MEMS/NEMS and BioMEMS/BioNEMS, and component-level studies of stiction phenomena in MEMS/NEMS devices.

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    Bharat Bhushan

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Bhushan, B. (2008). Nanotribology and Materials Characterization of MEMS/NEMS and BioMEMS/BioNEMS Materials and Devices. In: Nanotribology and Nanomechanics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-77608-6_22

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