Abstract
In 2001 volume production of the first MEMS-based angular rate sensor for roll-over sensing and navigation control started [3, 8]. In this paper the next generation of a micromachined gyroscope is presented. The new sensor again uses an oscillating disc which is deflected by a coriolis force in case of an angular rate applied. This deflection is measured capacitively by electrodes underneath the disc. The resonance frequency has been increased from 1.5kHz to 5kHz compared with the previous sensor generation. The sensor is packaged in an PLCC44 together with a fully digital signal processing unit. In order to facilitate a broad application the sensor is equipped with an digital output (SPI) as well as with an additional analog output.
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© 2003 Springer-Verlag Berlin Heidelberg
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Lang, M. et al. (2003). A New Micromachined Gyroscope with Digital Output. In: Valldorf, J., Gessner, W. (eds) Advanced Microsystems for Automotive Applications 2003. VDI-Buch. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-76988-0_12
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DOI: https://doi.org/10.1007/978-3-540-76988-0_12
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