Abstract
We examine performance enhancement of p-channel SiGe devices using our particle-based device simulator that takes into account self-consistently the bandstructure and the quantum mechanical space-quantization and mobility enhancement effects. We find surface roughness to be the dominant factor for the bad performance of p-channel SiGe devices when compared to conventional bulk p-MOSFETs at high bias conditions. At low and moderate bias conditions, when surface-roughness does not dominate the carrier transport, we observe performance enhancement in the operation of p-channel SiGe MOSFETs versus their conventional Si counterparts.
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References
Krishnamurthy, S., Sher, A., Chen, A.-B.: Phys. Rev. B 33, 1026 (1986)
Takeda, K., Taguchi, A., Sakata, M.: J. Phys. C 16, 2237 (1983)
Hinckley, J.M., Singh, J.: J. Appl. Phys. 76, 4192 (1994)
Nayak, D.K., Chun, S.K.: Appl. Phys. Lett., vol. 64, pp. 2514 (1994)
Abramo, A., et al.: Semicond. Sci. Technol., vol. 7B, pp. 597 (1992)
Bufler, F.M., et al.: J. Vac. Sci. Technol. B, vol. 16, pp. 1667 (1998)
Manku, T., et al.: IEEE Trans. Electron Devices, 40, 1990 (1993)
Yamada, T., Ferry, D.K.: Solid State Electron., vol. 38, pp. 881 (1995)
Fischetti, M.V., Laux, S.E.: J. Appl. Phys., vol. 80, pp. 2234 (1996)
Watling, J.R., Asenov, A., Barker, J.R.: Proceedings of IWCE 98, IEEE Cat. NO. 98EX116, pp. 96 (2004)
Barker, J.R., Watling, J.R.: Micoelectronic Engineering, vol. 47, pp. 369 (1999)
Nakatsuji, H., Kamakura, Y., Taniguchi, K.: IEDM Tech. Dig., pp. 727 (2002)
Oberhuber, R., Zandler, G., Vogl, P.: Phys. Rev. B, vol. 58, pp. 9941 (1998)
Fischetti, M.V., et al.: J. Appl. Phys., vol. 94, pp. 1079 (2003)
Ikonic, Z., Harrison, P., Kelsall, R.W.: Phys. Rev. B 64, 245311 (2001)
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Vasileska, D., Krishnan, S., Fischetti, M. (2007). Examining Performance Enhancement of p-Channel Strained-SiGe MOSFET Devices. In: Boyanov, T., Dimova, S., Georgiev, K., Nikolov, G. (eds) Numerical Methods and Applications. NMA 2006. Lecture Notes in Computer Science, vol 4310. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-70942-8_22
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DOI: https://doi.org/10.1007/978-3-540-70942-8_22
Publisher Name: Springer, Berlin, Heidelberg
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