Summary
In this chapter we discuss the design of optical diffusers for the generation of flat-top intensity distributions, as required for 248 nm or 193 nm excimerlaser applications [4,5]. We investigate the generation of far-field distributions with various shapes, uniform intensity and high efficiency.
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© 1999 Springer-Verlag Berlin Heidelberg
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Herzig, H.P., Kipfer, P. (1999). Aperture-modulated Diffusers (AMDs). In: Asakura, T. (eds) International Trends in Optics and Photonics. Springer Series in OPTICAL SCIENCES, vol 74. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-48886-6_16
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DOI: https://doi.org/10.1007/978-3-540-48886-6_16
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-14212-7
Online ISBN: 978-3-540-48886-6
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