Light Scattering Reviews 3 pp 109-130
Scattering by particles on or near a plane surface
Computation of light scattering from particles deposited upon a surface is of great interest in the simulation, development and calibration of surface scanners for wafer inspection . More recent applications include laser cleaning , scanning near-field optical microscopy (SNOM)  and plasmon resonances effects in surface-enhanced Raman spectroscopy (SERS) . Several studies have addressed this scattering problem using different methods. Simplified theoretical models have been developed on the basis of Lorenz-Mie theory and Fresnel surface reflection [5, 6, 7, 8]. A coupled-dipole algorithm has been employed by Taubenblatt and Tran  and Nebeker et al.  using a three-dimensional array of dipoles to model a feature shape and the Sommerfeld integrals to describe the interaction between a dipole and a surface. The theoretical aspects of the coupled-dipole model has been fully outlined by R. Schmehl . A model based on the discrete source method has been given by Eremin and Orlov [12,13], whereas the transmission conditions at the interface are satisfied analytically and the fields of discrete sources are derived by using the Green tensor for a plane surface. More details on computational methods and experimental results can be found in a book edited by Moreno and Gonzales .
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