Abstract
The monochromatic current is limited by the increasing electron-electron repulsive forces in high density beams. A simple analytical model for the effect of the “space charge” on the electron optical properties of cylindrical deflectors is presented. First-order compensation of the space charge effect is obtained by enlarging the deflection angle and by applying an additional negative bias to the top and bottom shields terminating the cylindrical deflectors. In spherical deflectors the azimuthal and radial foci are displaced from each other for high current loads.
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References
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H. Ibach, D.L. Mills: Electron Energy Loss Spectroscopy and Surface Vibrations (Academic, New York 1982), p.46
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© 1991 Springer-Verlag Berlin Heidelberg
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Ibach, H. (1991). The Electron Optics of the Ideal Cylindrical Field with Space Charge. In: Electron Energy Loss Spectrometers. Springer Series in Optical Sciences, vol 63. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-47157-8_4
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DOI: https://doi.org/10.1007/978-3-540-47157-8_4
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-13860-1
Online ISBN: 978-3-540-47157-8
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