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Optical Beam Deflection in Semiconductors with Electron Beam Excitation

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Photoacoustic and Photothermal Phenomena II

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 62))

Abstract

Optical beam deflection experiments performed in a scanning electron microscope are used to investigate electron-beam-specimen interactions and thermal and electronic diffusion in semiconductors.

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References

  1. J.C. Murphy, J.W. Maclachlan and L.C. Aamodt, IEEE Trans. Ultrason., Ferroelec., and Freq. Contr. UFFC-33, 529 (1986).

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  2. D. Fournier, A.C. Boccara, A. Skumanich and N.M. Amer, J. Appl. Phys. 59, 787 (1986).

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  3. V.A. Sablikov and V.B. Sandomirskii, phys. stat. sol (b) 120, 471 (1983).

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  4. J.W. Maclachlan, J.C. Murphy and L.C. Aamodt, Bull. Am. Phys. Soc. 33, 301 (1988).

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Author information

Authors and Affiliations

  1. Applied Physics Laboratory, The Johns Hopkins University, Johns Hopkins Road, Laurel, MD, 20707, USA

    J. C. Murphy, J. W. Maclachlan Spicer, R. B. Givens, L. C. Aamodt & G. Chang

Authors
  1. J. C. Murphy
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  2. J. W. Maclachlan Spicer
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  3. R. B. Givens
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  4. L. C. Aamodt
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  5. G. Chang
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Editor information

Editors and Affiliations

  1. Materials Science Department and Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD, 20723-6099, USA

    John C. Murphy

  2. Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD, 20723-6099, USA

    Jane W. Maclachlan Spicer Ph. D.  & Leonard C. Aamodt Ph. D.  & 

  3. School of Engineering and Applied Science, Department of Mechanical and Aerospace Engineering, Princeton University, Princeton, NJ, 08544-5263, USA

    Barrie S. H. Royce

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© 1990 Springer-Verlag Berlin Heidelberg

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Murphy, J.C., Spicer, J.W.M., Givens, R.B., Aamodt, L.C., Chang, G. (1990). Optical Beam Deflection in Semiconductors with Electron Beam Excitation. In: Murphy, J.C., Spicer, J.W.M., Aamodt, L.C., Royce, B.S.H. (eds) Photoacoustic and Photothermal Phenomena II. Springer Series in Optical Sciences, vol 62. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-46972-8_62

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  • DOI: https://doi.org/10.1007/978-3-540-46972-8_62

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-13795-6

  • Online ISBN: 978-3-540-46972-8

  • eBook Packages: Springer Book Archive

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