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Totally Reflecting Mirrors: Fabrication and Application in GaAs Rib Waveguide Devices

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Integrated Optics

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 48))

Abstract

Reactive ion etched rib waveguide mirrors in GaAs have low loss and are orientation independent. These properties makes them promising components of 1.0 devices, especially for improved waveguide to fiber coupling.

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References

  1. P. Buchmann and A. J. N. Houghton: “Optical Y-junctions and S-bends formed by preferentially etched single-mode rib waveguides in InP”, Electron. Lett. 18, 850 (1982)

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  2. T. M. Benson: “Etched-wall bent-guide structure for integrated optics in the III-V semiconductors”, J. of Lightwave Techn. LT-2, 31 (1984)

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  3. E. Lo Hu and R. E. Howard: “Reactive ion etching of GaAs and InP using CCl2F2/Ar/O2”, Appl. Phys. Lett. 37, 1022 (1980)

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  4. P. Buchmann, H. Kaufmann, H. Melchior and G. Guekos: “Reactive ion etched GaAs optical waveguide modulators with low loss and high speed”, Electron. Lett. 20, 295 (1984)

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  5. L. A. Coldren, K. Iga, B. I. Miller and J. A. Rentschler:“GaInAsP/InP stripe-geometry laser with a reactive-ion-etched facet”, Appl. Phys. Lett. 37, 681 (1980)

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  6. P. Buchmann and H. Kaufmann: to be published in J. of Lightwave Technology (1985)

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Author information

Authors and Affiliations

  1. Swiss Federal Institute of Technology, CH-8093, Zürich, Switzerland

    P. Buchmann, H. Kaufmann, H. Melchior & G. Guekos

Authors
  1. P. Buchmann
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  2. H. Kaufmann
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  3. H. Melchior
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  4. G. Guekos
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Editor information

Editors and Affiliations

  1. Heinrich-Hertz-Institut, Nachrichtentechnik Berlin GmbH, Einsteinufer 37, D-1000, Berlin 10, Germany

    Hans-Peter J. Nolting

  2. Technische Universität Hamburg-Harburg, Harburger Schloß-Straße 20, D-2100, Hamburg 90, Fed. Rep. of Germany

    Reinhard Ulrich

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© 1985 Springer-Verlag Berlin Heidelberg

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Buchmann, P., Kaufmann, H., Melchior, H., Guekos, G. (1985). Totally Reflecting Mirrors: Fabrication and Application in GaAs Rib Waveguide Devices. In: Nolting, HP.J., Ulrich, R. (eds) Integrated Optics. Springer Series in Optical Sciences, vol 48. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-39452-5_28

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  • DOI: https://doi.org/10.1007/978-3-540-39452-5_28

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-13571-6

  • Online ISBN: 978-3-540-39452-5

  • eBook Packages: Springer Book Archive

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