Abstract
All published experiments on scanning x-ray microscopy have used synchrotrons [1], but the technique may only become routine with a more convenient source. Laser plasmas, used in x-ray lithography [2] and contact microscopy [3], are being studied by the authors and others [4]. Recent and projected advances in small lasers make their use in scanning microscopy feasible. The plasma soft x-ray emission has been measured using lasers with repetition rates of up to 20 Hz — a Nd:YAG laser giving 0.5 J of TEMoo radiation with wavelength 1064 nm in 8 ns pulses, and a KrF excimer laser giving ≈ 0.3 J of 248 nm radiation in 25 ns pulses. Since most x-ray microscopes use zone plates a system based on these is discussed; TRAIL and BYER [5] have considered a multilayer microscope.
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References
See the papers on scanning x-ray microscopy in this volume and in Proc SPIE 733, (1987)
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© 1988 Springer-Verlag Berlin Heidelberg
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Michette, A.G., Burge, R.E., Rogoyski, A.M., O’Neill, F., Turcu, I.C.E. (1988). The Potential of Laser Plasma Sources in Scanning X-Ray Microscopy. In: Sayre, D., Kirz, J., Howells, M., Rarback, H. (eds) X-Ray Microscopy II. Springer Series in Optical Sciences, vol 56. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-39246-0_12
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DOI: https://doi.org/10.1007/978-3-540-39246-0_12
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