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Low-Noise Methods for Optical Measurements of Cantilever Deflections

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Applied Scanning Probe Methods V

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  1. Institute of Physics and Center for Nanotechnology, University of Münster, Heisenbergstr. 11, 48149, Münster, Germany

    Tilman E. Schäffer

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  1. Tilman E. Schäffer
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  1. Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM) W390 Scott Laboratory, The Ohio State University, 201W. 19th Avenue, Columbus, Ohio, 43210-1142, USA

    Bharat Bhushan

  2. Department of Mathematics, Osaka City University, Graduate School of Science, Sugimoto 3-3-138, 558-8585, Osaka, Japan

    Satoshi Kawata

  3. Center for Nanotechnology (CeNTech) and Institute of Physics, University of Münster, Gievenbecker Weg 11, 48149, Münster, Germany

    Harald Fuchs

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Schäffer, T.E. (2007). Low-Noise Methods for Optical Measurements of Cantilever Deflections. In: Bhushan, B., Kawata, S., Fuchs, H. (eds) Applied Scanning Probe Methods V. NanoScience and Technology. Springer, Berlin, Heidelberg . https://doi.org/10.1007/978-3-540-37316-2_3

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