Electrostatic Microscanner

Part of the NanoScience and Technology book series (NANO)


Atomic Force Microscope Suspension System Scanning Probe Microscope Driving Voltage Leaf Spring 
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© Springer-Verlag Berlin Heidelberg 2007

Authors and Affiliations

  1. 1.Tribology GroupNational Institute of Advanced Industrial Science and TechnologyTsukuba, IbarakiJapan

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