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Electrostatic Microscanner

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Part of the NanoScience and Technology book series (NANO)

Keywords

Atomic Force Microscope Suspension System Scanning Probe Microscope Driving Voltage Leaf Spring 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    Binning G, Rohrer H, Gerber C, Weibel E (1982) Phys Rev Lett 49:57CrossRefGoogle Scholar
  2. 2.
    Uchihashi T, Sugawara Y, Tsukamoto T, Ohta M, Morita S, Suzuki M (1997) Phys Rev B 56:9834CrossRefGoogle Scholar
  3. 3.
    Meyer G, Amer NM (1990) Appl Phys Lett 57:2089CrossRefGoogle Scholar
  4. 4.
    Ando Y, Ino J (1998) Wear 216:115CrossRefGoogle Scholar
  5. 5.
    Binnig G, Smith DPE (1986) Rev Sci Instrum 57:1688CrossRefGoogle Scholar
  6. 6.
    Croft D, Shed G, Devasia S (2001) J Dyn Syst Meas Control Trans ASME 123:35CrossRefGoogle Scholar
  7. 7.
    Akiyama Y (1986) Ultrasonic Motors/Actuators. Torikeppusu, Tokyo, p 19Google Scholar
  8. 8.
    Grétillat MA, Thiébaud P, de Rooij NF, Linder C (1994) IEEE Micro Electro Mechanical Systems. Oiso, p 97Google Scholar
  9. 9.
    Kim CJ, Pisano AP, Muller RS, Lim MG (1992) Sensor Actuat A Phys 33:221CrossRefGoogle Scholar
  10. 10.
    Diem B, Rey P, Renard S, Bosson SV, Bono H, Michel F, Delaye MT, Delapierre G (1995) Sensor Actuat A Phys 46:8CrossRefGoogle Scholar
  11. 11.
    Yee Y, Nam HJ, Lee SH, Bu JU, Lee JW (2001) Sens Actuator A Phys 89:166CrossRefGoogle Scholar
  12. 12.
    Hirano T, Furuhata T, Gabriel KJ, Fujita H (1991) 7th Int Conf Solid-State Sensors and Actuators (Transducers’ 91). San Francisco, p 873Google Scholar
  13. 13.
    Lee D, Krishnamoorthy U, Yu K, Solgaard O (2003) 12th Int Conf Solid-State Sensors and Actuators (Transducers’ 03). Boston, p 873Google Scholar
  14. 14.
    Hah D, Huang STY, Tsai JC, Toshiyoshi H, Wu MC (2004) J Microelectromech S 13:279CrossRefGoogle Scholar
  15. 15.
    Ando Y, Ikehara T, Matsumoto S (2002) Sens Actuator A Phys 97–98:579CrossRefGoogle Scholar
  16. 16.
    Ando Y (2004) Sens Actuator A Phys 114:285CrossRefGoogle Scholar
  17. 17.
    Ikehara T, Kato C, Suzuki Y, Fukuhara S, Watanabe T (1995) 13th Sensor Symp. Tokyo, p 149Google Scholar
  18. 18.
    Jansen H, Boer MD, Elwenspoek M (1996) 9th Int Workshop Micro Electro Mechanical Systems. San Diego, p 250Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2007

Authors and Affiliations

  1. 1.Tribology GroupNational Institute of Advanced Industrial Science and TechnologyTsukuba, IbarakiJapan

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