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Micro/Nanorobots

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Springer Handbook of Robotics

Abstract

The field of microrobotics covers the robotic manipulation of objects with dimensions in the millimeter to micron range as well as the design and fabrication of autonomous robotic agents that fall within this size range. Nanorobotics is defined in the same way only for dimensions smaller than a micron. With the ability to position and orient objects with micron- and nanometer-scale dimensions, manipulation at each of these scales is a promising way to enable the assembly of micro- and nanosystems, including micro- and nanorobots.

This chapter overviews the state of the art of both micro- and nanorobotics, outlines scaling effects, actuation, and sensing and fabrication at these scales, and focuses on micro- and nanorobotic manipulation systems and their application in microassembly, biotechnology, and the construction and characterization of micro and nanoelectromechanical systems (MEMS/NEMS). Material science, biotechnology, and micro- and nanoelectronics will also benefit from advances in these areas of robotics.

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Abbreviations

AM:

actuators for manipulation

AP:

antipersonnel

ASIC:

application-specific integrated circuit

CCD:

charge-coupled devices

CNT:

carbon nanotubes

CU:

control unit

DOF:

degree of freedom

DPN:

dip-pen nanolithography

DRIE:

deep reactive ion etching

EBID:

electron-beam-induced deposition

EDM:

electrical discharge machining

EDM:

electronic distance measuring

FESEM:

field-emission SEM

HRTEM:

high-resolution transmission electron microscopes

MBE:

molecular-beam epitaxy

MEMS:

microelectromechanical systems

MITI:

Ministry of International Trade and Industry

MOCVD:

metallo-organic chemical vapor deposition

MST:

microsystem technology

NEMS:

nanoelectromechanical systems

NRM:

nanorobotic manipulators

OM:

optical microscope

PID:

proportional–integral–derivative

PMMA:

polymethyl methacrylate

PR:

photoresist

PS:

power source

PVDF:

polyvinyledene fluoride

PZT:

lead zirconate titanate

QD:

quantum dot

RT:

reaction time

RT:

room-temperature

SEM:

scanning electron microscopes

SET:

single-electron transistors

SMA:

shape-memory alloy

SNOM:

scanning near-field OM

SOI:

silicon-on-insulator

STM:

scanning tunneling microscopes

SWNT:

single-walled carbon nanotubes

TEM:

transmission electron microscopes

US:

ultrasound

ZP:

zona pellucida

vdW:

van der Waals

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Authors and Affiliations

  1. Institute of Robotics and Intelligent Systems, ETH Zentrum, Tannenstr. 3, 8092, Zürich, Switzerland

    Bradley J. Nelson Prof

  2. Institute of Robotics and Intelligent Systems, ETH Zentrum, Tannenstr. 3, 8092, Zürich, Switzerland

    Lixin Dong Prof

  3. Department of Bioengineering and Robotics, Tohoku University, 6-6-01 Aoba-yama, 980-8579, Sendai, Japan

    Fumihito Arai Prof

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  1. Bradley J. Nelson Prof
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  1. PRISMA Lab, Dipartimento di Informatica e Sistemistica, Universitá degli Studi di Napoli Federico II, 80125, Napoli, Italy, Via Claudio 21

    Bruno Siciliano Prof.

  2. Artificial Intelligence Laboratory, Department of Computer Science, Stanford University, 94305-9010, Stanford, CA, USA

    Oussama Khatib Prof.

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Nelson, B.J., Dong, L., Arai, F. (2008). Micro/Nanorobots. In: Siciliano, B., Khatib, O. (eds) Springer Handbook of Robotics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-30301-5_19

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