Film and Foil-Based Shape Memory Alloy Microactuators for Fluid Handling

  • Hinnerk Ossmer
  • Marcel Gueltig
  • Christoph Wessendorf
  • Manfred Kohl
  • Christof Megnin
Conference paper
Part of the The Minerals, Metals & Materials Series book series (MMMS)

Abstract

In this contribution, the potential of film and foil-based shape memory alloy (SMA) microactuators for fluid handling applications is explored. SMAs provide a high work density and allow for compact and robust actuator designs based on the one-way shape memory effect. Compared to more commonly used wires, actuators fabricated from thin film or foil material allow for more complex designs having several degrees of freedom and enable shorter switching times in the range of 10 ms. In order to commercialize such actuators, the “memetis GmbH” was founded as a high-tech spin-off of the Karlsruhe Institute of Technology (KIT) in Germany. Memetis is focused on miniature fluid handling products and combines rapid prototyping and rapid manufacturing techniques such as 3D printing, laser cutting and CNC milling of polymer housings for customer-specific device development. A normally open microvalve is presented here as an example, which is actuated by a novel fatigue-free TiNiCu film actuator.

Keywords

Shape memory alloy Fatigue-free Miniature valve Fluid handling 

Notes

Acknowledgements

The authors acknowledge funding by Exist Forschungstransfer, a program of ESF and BmWi.

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Copyright information

© The Minerals, Metals & Materials Society 2018

Authors and Affiliations

  • Hinnerk Ossmer
    • 1
    • 2
  • Marcel Gueltig
    • 1
    • 2
  • Christoph Wessendorf
    • 1
    • 2
  • Manfred Kohl
    • 2
  • Christof Megnin
    • 1
    • 2
  1. 1.Memetis GmbHEggenstein-LeopoldshafenGermany
  2. 2.Karlsruhe Institute of Technology, Institute of Microstructure TechnologyEggenstein-LeopoldshafenGermany

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