Epitaxial Growth of III-Nitride Compounds pp 125-144 | Cite as
Initial Epitaxial Growth Processes of III-Nitride Compounds
Chapter
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Abstract
The epitaxial growth of thin films is controlled by various growth processes that involve adsorption of atoms and molecules onto a reconstructed surface, their subsequent diffusion across the surface, dissociation of molecules, and desorption from the surface.
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