In-Line Quality Control of Organic Thin Film Fabrication on Rigid and Flexible Substrates

  • Argiris Laskarakis
  • Stergios Logothetidis
Part of the Springer Series in Surface Sciences book series (SSSUR, volume 52)


A major factor for the achievement of the required performance, efficiency and lifetime of organic electronic (OE) devices (Organic Photovoltaics—OPVs, Organic Light Emitting Diodes—OLEDs, etc.) is the quality control of the substrates, active layers, barrier materials and transparent electrode nanolayers that are used for the fabrication of these devices. The in-line optical characterization and modeling of the optical and electrical properties of the above nanolayers can give valuable information of the growth mechanisms and the structure-property relationships that can play a major role towards the optimization of the nanolayers performance. Also, the capability for in-line monitoring, at every single step, of the optical properties and the quality of the fabricated nanolayers, e.g. by roll-to-roll (r2r) process, will improve the process yield opening the way for the low cost fabrication of OE devices. In this chapter, we will discuss in detail the latest advances on the combination of optical sensing by Spectroscopic Ellipsometry with the processes (vacuum deposition, r2r printing) for fabrication of OE nanolayers and devices. These advances include the results of the determination of the optical constants, composition, refractive index, thickness with nm precision, stability and the uniformity of the OE nanolayers onto rigid (e.g. c-Si, glass) and flexible (as Polyethylene Terephthalate—PET) substrates.



The authors would like to thank Dr. Nikolaos Kalfagiannis, Dr. Despoina Georgiou, Dr. Christos Koidis, Dr. Panagiotis G. Karagiannidis and the other staff of the Lab for Thin Films, Nanosystems and Nanometrology (LTFN) for their contribution. The authors would also like to thank Amcor for supply of the SiO\(_{x}\)/PET rolls, Clevios for the supply of the PEDOT:PSS formulations and Fraunhofer-Institut für Silicatforschung for the supply of the hybrid polymer formulations. This work was partially supported by the EC STREP Project OLAtronics, Grand Agreement No. 216211, and by the EC REGPOT Project ROleMak No. 286022.


  1. 1.
    D.M. de Leeuw, E. Cantatore, Mater. Sci. Semicond. Proces. 11, 199 (2008)CrossRefGoogle Scholar
  2. 2.
    F.C. Krebs, Org. Electron. 10, 761 (2009)CrossRefGoogle Scholar
  3. 3.
    M. Cavallini, M. Facchini, M. Massi, F. Biscarini, Synth. Met. 146, 283 (2004)CrossRefGoogle Scholar
  4. 4.
    P. Kopola, T. Aernouts, R. Sliz, S. Guillerez, M. Ylikunnari, D. Cheyns, M. Välimäki, M. Tuomikoski, J. Hast, G. Jabbour, R. Myllylä, A. Maaninen, Sol. Energy Mater. Sol. Cells 95, 1344 (2011)CrossRefGoogle Scholar
  5. 5.
    S. Logothetidis, Mater. Sci. Eng. B 152, 96 (2008)CrossRefGoogle Scholar
  6. 6.
    S. Logothetidis, A. Laskarakis, Eur. Phys. J. Appl. Phys. 46, 12502 (2009)ADSCrossRefGoogle Scholar
  7. 7.
    White Paper OE—A Roadmap (2011)Google Scholar
  8. 8.
    P. Kumar, S. Chand, Prog. Photovolt. Res. Appl. 20(4), 377 (2012)Google Scholar
  9. 9.
    A. Laskarakis, S. Logothetidis, J. Appl. Phys. 99, 066101 (2006)ADSCrossRefGoogle Scholar
  10. 10.
    A. Laskarakis, S. Logothetidis, J. Appl. Phys. 101, 053503 (2007)ADSCrossRefGoogle Scholar
  11. 11.
    S. Logothetidis, in Thin Films Handbook, ed. by H.S. Nalwa (Academic Press, Dublin, 2001)Google Scholar
  12. 12.
    V.G. Kechagias, M. Gioti, S. Logothetidis, R. Benferhat, D. Teer, Thin Solid Films 364, 213 (2000)ADSCrossRefGoogle Scholar
  13. 13.
    S. Logothetidis, A. Laskarakis, A. Gika, P. Patsalas, Surf. Coat. Technol. 152, 204 (2002)CrossRefGoogle Scholar
  14. 14.
    G.E. Irene, H.G. Tompkins (eds.), Handbook of Ellipsometry (William Andrew Publishing, Norwich, 2005)Google Scholar
  15. 15.
    A. Laskarakis, S. Kassavetis, C. Gravalidis, S. Logothetidis, Nucl. Instrum. Methods Phys. Res. Sect. B: Beam Interact. Mater. At. 268, 460 (2010)Google Scholar
  16. 16.
    M. Gioti, S. Logothetidis, C. Charitidis, Y. Panayiotatos, I. Varsano, Sens. Actuators 99, 35 (2002)CrossRefGoogle Scholar
  17. 17.
    R.W. Collins, J. Koh, H. Fujiwara, P.I. Rovira, A.S. Ferlauto, J.A. Zapien, C.R. Wronski, R. Messier, Appl. Surf. Sci. 154–155, 217 (2000)ADSCrossRefGoogle Scholar
  18. 18.
    A. Laskarakis, S. Logothetidis, S. Kassavetis, E. Papaioannou, Thin Solid Films 516, 1443 (2008)ADSCrossRefGoogle Scholar
  19. 19.
    L.R. Dahal, Z. Huang, D. Attygalle, M.N. Sestak, C. Salupo, S. Marsillac, R.W. Collins, 35th IEEE Photovoltaic Specialists Conference (2010), p. 000631Google Scholar
  20. 20.
    K. Heymann, G. Mirschel, T. Scherzer, M. Buchmeiser, Vib. Spectrosc. 51, 152 (2009)CrossRefGoogle Scholar
  21. 21.
    B. Schmidt-Hansberg, M.F.G. Klein, K. Peters, F. Buss, J. Pfeifer, S. Walheim, A. Colsmann, U. Lemmer, P. Scharfer, W. Schabel, J. Appl. Phys. 106, 124501 (2009)ADSCrossRefGoogle Scholar
  22. 22.
    S. Logothetidis, Method for the In-situ and Real-time Determination of the Thickness, Optical Properties and Quality of Transparent Coatings During their Growth onto Polymeric Substrates and Determination of the Modification, Activation and the Modification Depth of Polym, U.S. Patent 7,777,882 (2010)Google Scholar
  23. 23.
    S. Logothetidis, Method for In-line Determination of Film Thickness and Quality During Printing Processes for the Production of Organic Electronics, U.S. Patent PCT/GR2011/000018 (2011)Google Scholar
  24. 24.
    S. Logothetidis, D. Georgiou, A. Laskarakis, C. Koidis, N. Kalfagiannis, Sol. Energy Mater. Sol. Cells 112, 144 (2013)CrossRefGoogle Scholar
  25. 25.
    J. Noh, D. Yeom, C. Lim, H. Cha, J. Han, J. Kim, Y. Park, V. Subramanian, G. Cho, IEEE Trans. Electron. Packag. Manuf. 33, 275 (2010)CrossRefGoogle Scholar
  26. 26.
    Y.-J. Cheng, S.-H. Yang, C.-S. Hsu, Chem. Rev. 109, 5868 (2009)CrossRefGoogle Scholar
  27. 27.
    C.-Y. Lo, J. Hiitola-Keinänen, O.-H. Huttunen, J. Petäjä, J. Hast, A. Maaninen, H. Kopola, H. Fujita, H. Toshiyoshi, Microelectron. Eng. 86, 979 (2009)CrossRefGoogle Scholar
  28. 28.
    C. Koidis, S. Logothetidis, S. Kassavetis, C. Kapnopoulos, P.G. Karagiannidis, D. Georgiou, A. Laskarakis, Sol. Energy Mater. Sol. Cells 112, 36 (2013)CrossRefGoogle Scholar
  29. 29.
    A. Laskarakis, S. Logothetidis, M. Gioti, Phys. Rev. 64, 1 (2001)CrossRefGoogle Scholar
  30. 30.
    C. Chen, M.W. Horn, S. Pursel, C. Ross, R.W. Collins, Appl. Surf. Sci. 253, 38 (2006)ADSCrossRefGoogle Scholar
  31. 31.
    S. Logothetidis, M. Gioti, P. Patsalas, Diam. Relat. Mater. 10, 117 (2001)ADSCrossRefGoogle Scholar
  32. 32.
    C. Gravalidis, M. Gioti, A. Laskarakis, S. Logothetidis, Surf. Coat. Technol. 181, 655 (2004)CrossRefGoogle Scholar
  33. 33.
    M. Gioti, S. Logothetidis, P. Patsalas, A. Laskarakis, Y. Panayiotatos, V. Kechagias, Surf. Coat. Technol. 125, 289 (2000)CrossRefGoogle Scholar
  34. 34.
    C. Koidis, S. Logothetidis, D. Georgiou, A. Laskarakis, Phys. Status Solidi C 5, 1366 (2008)ADSCrossRefGoogle Scholar
  35. 35.
    A. Laskarakis, S. Kassavetis, C. Gravalidis, S. Logothetidis, Nucl. Instrum. Methods Phys. Res. B 268, 460 (2010)ADSCrossRefGoogle Scholar
  36. 36.
    A. Laskarakis, S. Logothetidis, Appl. Surf. Sci. 253, 52 (2006)ADSCrossRefGoogle Scholar
  37. 37.
    G.E. Jellison, F.A. Modine, Appl. Phys. Lett. 69, 371 (1996)ADSCrossRefGoogle Scholar
  38. 38.
    H.F. Dam, F.C. Krebs, Sol. Energy Mater. Sol. Cells 97, 191 (2012)CrossRefGoogle Scholar
  39. 39.
    A. Laskarakis, S. Logothetidis, E. Pavlopoulou, M. Gioti, Thin Solid Films 455–456, 43 (2004)CrossRefGoogle Scholar
  40. 40.
    T. Yoshioka, M. Tsuji, Y. Kawahara, S. Kohjiya, J. Appl. Polym. Sci. 44, 7997 (2003)Google Scholar
  41. 41.
    L.A.A. Pettersson, S. Ghosh, O. Inganas, Org. Electron. 3, 143 (2002)CrossRefGoogle Scholar
  42. 42.
    F.C. Krebs, Sol. Energy Mater. Sol. Cells 93, 394 (2009)CrossRefGoogle Scholar
  43. 43.
    P.E. Burrows, G.L. Graff, M.E. Gross, P.M. Martin, M.K. Shi, M. Hall, E. Mast, C. Bonham, W. Bennett, M.B. Sullivan, Displays 22, 65 (2001)CrossRefGoogle Scholar
  44. 44.
    C. Charton, N. Schiller, M. Fahland, A. Hollander, A. Wedel, K. Noller, Thin Solid Films 502, 99 (2006)ADSCrossRefGoogle Scholar
  45. 45.
    K. Haas, S. Amberg-Schwab, K. Rose, Thin Solid Films 351, 198 (1999)ADSCrossRefGoogle Scholar
  46. 46.
    J. Fahlteich, M. Fahland, W. Schönberger, N. Schiller, Thin Solid Films 517, 3075 (2009)ADSCrossRefGoogle Scholar
  47. 47.
    B.M. Hanika, H. Langowski, U. Moosheimer, W. Peukert, Chem. Eng. Technol. 26, 605 (2003)CrossRefGoogle Scholar
  48. 48.
    K. Haas, K. Rose, Rev. Adv. Mater. Sci. 5, 47 (2003)Google Scholar
  49. 49.
    D. Georgiou, S. Logothetidis, C. Koidis, A. Laskarakis, Phys. Status Solidi C 5, 1300 (2008)ADSCrossRefGoogle Scholar
  50. 50.
    D.G. Howells, B.M. Henry, J. Madocks, H.E. Assender, Thin Solid Films 516, 3081 (2008)ADSCrossRefGoogle Scholar
  51. 51.
    A.P. Roberts, B.M. Henry, A.P. Sutton, C.R.M. Grovenor, G.A.D. Briggs, T. Miyamoto, M. Kano, Y. Tsukahara, M. Yanaka, J. Membr. Sci. 208, 75 (2002)CrossRefGoogle Scholar
  52. 52.
    A.S. da Silva Sobrinho, M. Latreche, G. Czeremuszkin, J.E. Klemberg-Sapieha, M.R. Wertheimer, J. Vac. Sci. Technol. A 16(6), 3190 (1998)ADSCrossRefGoogle Scholar
  53. 53.
    M. Yanaka, B.M. Henry, A.P. Roberts, C.R.M. Grovenor, G.A.D. Briggs, A.P. Sutton, Thin Solid Films 397, 176 (2001)ADSCrossRefGoogle Scholar
  54. 54.
    D. Georgiou, A. Laskarakis, C. Koidis, N. Goktsis, S. Logothetidis, Phys. Status Solidi C 5, 3387 (2008)ADSCrossRefGoogle Scholar
  55. 55.
    Y. Chen, K.S. Kang, K.J. Han, K.H. Yoo, J. Kim, Synth. Met. 159, 1701 (2009)CrossRefGoogle Scholar
  56. 56.
    A.M. Nardes, R.A.J. Janssen, M. Kemerink, Adv. Funct. Mater. 18, 865 (2008)CrossRefGoogle Scholar
  57. 57.
    Z. Xiong, C. Liu, Org. Electron. 13, 1532 (2012)CrossRefGoogle Scholar
  58. 58.
    A. Nardes, M. Kemerink, R. Janssen, Phys. Rev. B 76, 1 (2007)CrossRefGoogle Scholar
  59. 59.
    G. Wang, S.-I. Na, T.-W. Kim, Y. Kim, S. Park, T. Lee, Org. Electron. 13, 771 (2012)CrossRefGoogle Scholar
  60. 60.
    T.P. Nguyen, P. Le Rendu, P.D. Long, S.A. De Vos, Surf. Coat. Technol. 180–181, 646 (2004)CrossRefGoogle Scholar
  61. 61.
    O.P. Dimitriev, D.A. Grinko, Y.V. Noskov, N.A. Ogurtsov, A.A. Pud, Synth. Met. 159, 2237 (2009)CrossRefGoogle Scholar
  62. 62.
    C.J. Brabec, Sol. Energy Mater. Sol. Cells 83, 273 (2004)CrossRefGoogle Scholar
  63. 63.
    H. Hoppe, N.S. Sariciftci, J. Mater. Res. 19, 1924 (2011)ADSCrossRefGoogle Scholar
  64. 64.
    A. Onorato, M.A. Invernale, I.D. Berghorn, C. Pavlik, G.A. Sotzing, M.B. Smith, Synth. Met. 160, 2284 (2010)CrossRefGoogle Scholar
  65. 65.
    S.-I. Na, G. Wang, S.-S. Kim, T.-W. Kim, S.-H. Oh, B.-K. Yu, T. Lee, D.-Y. Kim, J. Mater. Chem. 19, 9045 (2009)CrossRefGoogle Scholar
  66. 66.
    N.G. Semaltianos, S. Logothetidis, N. Hastas, W. Perrie, S. Romani, R.J. Potter, G. Dearden, K.G. Watkins, P. French, M. Sharp, Chem. Phys. Lett. 484, 283 (2010)ADSCrossRefGoogle Scholar
  67. 67.
    A. Nardes, M. Kemerink, M. Dekok, E. Vinken, K. Maturova, R. Janssen, Org. Electron. 9, 727 (2008)CrossRefGoogle Scholar
  68. 68.
    S. Jonsson, J. Birgerson, X. Crispin, G. Greczynski, W. Osikowicz, A.W.D. van der Gon, W.R. Salaneck, M. Fahlman, Synth. Met. 139, 1 (2003)CrossRefGoogle Scholar
  69. 69.
    H. Yan, H. Okuzaki, Synth. Met. 159, 2225 (2009)CrossRefGoogle Scholar
  70. 70.
    M. Fabretto, C. Hall, T. Vaithianathan, P.C. Innis, J. Mazurkiewicz, G.G. Wallace, P. Murphy, Thin Solid Films 516, 7828 (2008)ADSCrossRefGoogle Scholar
  71. 71.
    A. Laskarakis, P.G. Karagiannidis, D. Georgiou, D.M. Nikolaidou, S. Logothetidis, Thin Solid Films (2013),
  72. 72.
    B. Friedel, P.E. Keivanidis, T.J.K. Brenner, A. Abrusci, C.R. McNeill, R.H. Friend, N.C. Greenham, Macromolecules 42, 6741 (2009)ADSCrossRefGoogle Scholar
  73. 73.
    Y.H. Kim, C. Sachse, M.L. Machala, C. May, L. Müller-Meskamp, K. Leo, Adv. Funct. Mater. 21, 1076 (2011)CrossRefGoogle Scholar
  74. 74.
    S.-I. Na, S.-S. Kim, J. Jo, D.-Y. Kim, Adv. Mater. 20, 4061 (2008)CrossRefGoogle Scholar
  75. 75.
    M.V. Madsen, K.O. Sylvester-hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, F.C. Krebs, J. Phys. Chem. C 115, 10817 (2011)CrossRefGoogle Scholar
  76. 76.
    L.A.A. Pettersson, T. Johansson, F. Carlsson, H. Arwin, O. Inganäs, Synth. Met. 101, 198 (1999)CrossRefGoogle Scholar
  77. 77.
    K. Yim, R. Friend, J. Kim, J. Chem. Phys. 124, 184706 (2006)ADSCrossRefGoogle Scholar
  78. 78.
    S. Logothetidis, A. Laskarakis, Eur. Phys. J. Appl. Phys. 46, 12502 (2009)ADSCrossRefGoogle Scholar
  79. 79.
    D. Georgiou, A. Laskarakis, S. Logothetidis, S. Amberg-Schwab, U. Weber, M. Schmidt, K. Noller, Appl. Surf. Sci. 255, 8023 (2009)ADSCrossRefGoogle Scholar
  80. 80.
    A. Laskarakis, S. Logothetidis, D. Georgiou, S. Amberg-Schwab, U. Weber, Thin Solid Films 517, 6275 (2009)ADSCrossRefGoogle Scholar
  81. 81.
    Y. Leterrier, Prog. Mater. Sci. 48, 1 (2003)CrossRefGoogle Scholar
  82. 82.
    N. Koch, Chem. Phys. Chem. 8, 1438 (2007)CrossRefGoogle Scholar
  83. 83.
    P.G. Karagiannidis, N. Kalfagiannis, D. Georgiou, A. Laskarakis, N.A. Hastas, C. Pitsalidis, S. Logothetidis, J. Mater. Chem. 22, 14624 (2012)CrossRefGoogle Scholar
  84. 84.
    P.G. Karagiannidis, D. Georgiou, C. Pitsalidis, A. Laskarakis, S. Logothetidis, Mater. Chem. Phys. 129, 1207 (2011)CrossRefGoogle Scholar
  85. 85.
    M.M. Voigt, R.C.I. Mackenzie, C.P. Yau, P. Atienzar, J. Dane, P.E. Keivanidis, D.D.C. Bradley, J. Nelson, Sol. Energy Mater. Sol. Cells 95, 731 (2011)CrossRefGoogle Scholar
  86. 86.
    D.C. Harris, M.D. Bertolucci, Symmetry and Spectroscopy (Oxford University Press, New York, 1978)Google Scholar

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Authors and Affiliations

  1. 1.Lab for Thin Films-Nanosystems & Nanometrology (LTFN), Department of PhysicsAristotle University of ThessalonikiThessalonikiGreece

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