Abstract
Data analysis is an important aspect of spectroscopic ellipsometry (SE). The measurement is directly related to the polarization change of probing light upon reflection from a sample surface. Data analysis enables determination of physical material properties of interest, such as film thickness, material dielectric functions, composition, crystallinity, conductivity, and more. This is achieved through model-based regression analysis. In this chapter, we detail the typical SE data analysis procedures. The fundamentals of optical modeling are outlined. Different ways to describe material dielectric functions are reviewed. Principles of fitting and evaluation of results are discussed. The chapter concludes with a review of strategies for common sample structures, categorized as transparent thin films, absorbing thin films, or films which are both transparent and absorbing, depending on the wavelength considered.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Similar content being viewed by others
References
P.Y. Yu, M. Cardona, Fundamentals of Semiconductors: Physics and Materials Properties (Springer, Berlin, 2001)
D.E. Aspnes, A.A. Studna, Phys. Rev. B 27, 985 (1983)
Y.S. Ihn, T.J. Kim, D.E. Aspnes, J. Kossut, Y.D. Kim, Appl. Phys. Lett. 84, 693 (2004)
R.A. Synowicki, Thin Solid Films 313–314, 394 (1998)
E.D. Palik (ed.), Handbook of Optical Constants of Solids I, II, III (Academic Press, San Diego, 1998)
S. Adachi, Optical Constants of Crystalline and Amorphous Semiconductors: Numerical Data and Graphical Information (Kluwer Academic Publishers, Boston, 1999)
S. Adachi, Optical Constants of Crystalline and Amorphous Semiconductors: Materials and Fundamental Principles (Kluwer Academic Publishers, Boston, 1999)
M. Losurdo, K. Hingerl (eds.), Ellipsometry at the Nanoscale (Springer, Berlin, 2013)
P.G. Snyder, J.A. Woollam, S.A. Alterovitz, B. Johs, J. Appl. Phys. 68, 5925 (1990)
E. Hecht, Optics, 4th edn. (Addison-Wesley, San Francisco, 2002)
R.C. Jones, J. Opt. Soc. Am. 31, 488 (1941)
R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light (North Holland, Amsterdam, 1977)
H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, West Sussex, UK, 2007)
G.E. Jellison, Jr., Handbook of Ellipsometry, ed. by H.G. Tompkins, E.A. Irene (William Andrew, New York, 2005), pp. 241–245. Chap. “Data Analysis for Spectroscopic Ellipsometry”
J. Woollam, B. Johs, C. Herzinger, J. Hilfiker, R. Synowicki, C. Bungay, SPIE Proc. CR72, 10 (1999)
W.H. Press, B.P. Flannery, S.A. Teukolsky, W.T. Vetterling, Numerical Recipes in C (Cambridge University Press, Cambridge, 1988)
J.N. Hilfiker, N. Singh, T. Tiwald, D. Convey, S.M. Smith, J.H. Baker, H.G. Tompkins, Thin Solid Films 516, 7979–7989 (2008)
J.N. Hilfiker, R.A. Synowicki, H.G. Tompkins, SVC Proc. 511–516 (2008)
D.E. Aspnes, F. Hottier, J.B. Theeten, Phys. Rev. B 20, 3292 (1979)
M.F. Saenger, J. Sun, M. Schadel, J.N. Hilfiker, M. Schubert, J.A. Woollam, Thin Solid Films 518, 1830 (2010)
S.-H. Hsu, E.-S. Liu, Y.-C. Chang, J.N. Hilfiker, Y.D. Kim, T.J. Kim, C-J. Lin, G.-R. Lin, Phys. Status Solid A 205, 876 (2008)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2018 Springer International Publishing AG, part of Springer Nature
About this chapter
Cite this chapter
Hilfiker, J.N., Sun, J., Hong, N. (2018). Data Analysis. In: Fujiwara, H., Collins, R. (eds) Spectroscopic Ellipsometry for Photovoltaics. Springer Series in Optical Sciences, vol 212. Springer, Cham. https://doi.org/10.1007/978-3-319-75377-5_3
Download citation
DOI: https://doi.org/10.1007/978-3-319-75377-5_3
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-75375-1
Online ISBN: 978-3-319-75377-5
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)