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Optical Characterization of Thin Solid Films pp 143–175Cite as

Data Processing Methods for Imaging Spectrophotometry

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Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 64))

Abstract

Data processing approaches and algorithms for imaging optical techniques are discussed, with focus on imaging spectrophotometry in the visible and ultraviolet regions. Since the techniques often produce large quantities of data, efficient data fitting methods must be developed. This is covered from the high-level view of attacking the huge least squares problem and splitting it in different ways in order to extract useful information, as well as construction of effective models for individual phenomena and types of samples. Efficient computation of optical quantities is discussed for ideal, non-uniform and rough films together with modelling of optical constants and spectral or angular averaging.

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Author information

Authors and Affiliations

  1. Plasma Technologies, CEITEC, Masaryk University, Purkyňova 123, 61200, Brno, Czech Republic

    David Nečas

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  1. David Nečas
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Correspondence to David Nečas .

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Editors and Affiliations

  1. Abbe School of Photonics, Friedrich-Schiller-University Jena, Jena, Thüringen, Germany

    Olaf Stenzel

  2. Institute of Physical Engineering, Brno University of Technology, Brno, Czech Republic

    Miloslav Ohlídal

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Nečas, D. (2018). Data Processing Methods for Imaging Spectrophotometry. In: Stenzel, O., Ohlídal, M. (eds) Optical Characterization of Thin Solid Films. Springer Series in Surface Sciences, vol 64. Springer, Cham. https://doi.org/10.1007/978-3-319-75325-6_6

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