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DEM Extensions: Flexible Substrate Models

  • Tarek I. ZohdiEmail author
Chapter
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Part of the Lecture Notes in Applied and Computational Mechanics book series (LNACM, volume 60)

Abstract

In certain applications, because the substrate is fragile, knowledge of the induced stresses is important in order to control the process.

Keywords

Multibody Dynamics Formulations Stress-induced Substance Imprint Lithography Initial Time Step Size Photoresist Template 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Authors and Affiliations

  1. 1.University of CaliforniaBerkeleyUSA

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