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CMOS Multimodal Sensor Array for Biomedical Sensing

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Multimodal sensor arrays with potentiometric, amperometric, impedimetric, and photometric sensors have been designed and fabricated by standard CMOS process and post-CMOS process to form gold electrodes and microfluidics. Three types of sensor arrays, 64 × 64 potentiometric and photometric sensor array, 64 × 64 ASSP (application-specific standard product) sensor array, and 512 × 512 high-density sensor array, are implemented in 7 × 7.5 mm2 chip and total power consumption 10 mW using 0.6 μm CMOS technology. In potentiometric and photometric sensor array, electric potential is sensed and outputted as an analog signal by a cascode source-drain follower, and photocurrent is converted to digital signal by current-mode ADC (analog-to-digital converter). In ASSP sensor array, potentiometric, amperometric, impedimetric, and photometric sensors output electric currents which are processed by current mixers and current-mode ADCs in array peripheral circuits. In high-density sensor array, submicron gold electrodes are formed by electroless plating. These sensors are applied to enzyme sensor with redox mediator and counting bacteria/viruses one by one. Stand-alone portable diagnostic inspection system is constructed with 18 × 10 × 5.5 cm3 and 850 g. Power is 5 V 220 mA supplied from USB adapter.


  • Complementary Metal Oxide Semiconductor (CMOS)
  • High-density Sensor Arrays
  • Standard CMOS Process
  • Application-specific Standard Product (ASSP)
  • Photometric Sensor

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This research is financially supported by a Grant-in-Aid for Scientific Research (No. 25220906, 20226009) from the Ministry of Education, Culture, Sports, Science and Technology of Japan and by Adaptable and Seamless Technology Transfer Program through Target-Driven R&D (No. AS272S001b) from the Japan Science and Technology Agency, Japan.

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Correspondence to Kazuo Nakazato .

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Nakazato, K. (2018). CMOS Multimodal Sensor Array for Biomedical Sensing. In: Mitra, S., Cumming, D. (eds) CMOS Circuits for Biological Sensing and Processing. Springer, Cham.

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