Skip to main content
SpringerLink
Log in

Development of Functional Coatings by Electron-Beam Sputtering of Sol-Gel Targets

  • Conference paper
  • First Online:
Recent Advances in Technology Research and Education (INTER-ACADEMIA 2017)

Part of the book series: Advances in Intelligent Systems and Computing ((AISC,volume 660))

Included in the following conference series:

  • 1265 Accesses

Abstract

To obtain coatings by electron-beam sputtering have been developed and synthesized by a sol-gel method based on a target of SiO2, TiO2, ZrO2, ZrO2/In2O3, Al2O3. Spectroscopic studies conducted for formed coatings and identified their main optical characteristics such as refractive index, reflectance, transmission and absorption. Researches morphology layers formed by atomic force.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Antonenko, S.V.: Technology of Thin Films, Textbook, p. 104. MEPI, Moscow (2008)

    Google Scholar 

  2. Rogachev, A.V., Zhou, B., Jiang, X., Liu, Z., Shen, R.: Mater. Sci. Semicond. Process. 16, 513–519 (2013)

    Article  Google Scholar 

  3. Rogachev, A.V., Kovalenko, D.L., Luca, D., Gaishun, V.E., Gorbachev, D.L., Vaskevich, V.V., Dobromir, M., Chirtsov, A.S.: Adv. Mater. Res. 1117, 156–158 (2015)

    Article  Google Scholar 

Download references

Acknowledgments

The work was supported by Belarusian Foundation for Fundamental Research (Project T16-RA005) and by Academy of Sciences of Romania.

Author information

Authors and Affiliations

  1. Francisk Skorina Gomel State University, Sovetskaya Str. 104, 246019, Gomel, Belarus

    Dmitry Kovalenko, Vladimir Gaishun, Alexandr V. Rogachev, Vasily Vaskevich, Yanina Kosenok & Alexey Rusykin

  2. Institute of Powder Metallurgy of NAS of Belarus, Platonova Str. 41, 220005, Minsk, Belarus

    Dumitru Luca

  3. Alexandru Ioan Cuza University of Iasi, Bulevardul Carol I, Nr.11, 700506, Iasi, Romania

    Larisa Sudnik

Authors
  1. Dmitry Kovalenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Dumitru Luca
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Vladimir Gaishun
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Larisa Sudnik
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Alexandr V. Rogachev
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Vasily Vaskevich
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Yanina Kosenok
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Alexey Rusykin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Dmitry Kovalenko .

Editor information

Editors and Affiliations

  1. Faculty of Physics, Iasi Plasma Advanced Research Center, Alexandru Ioan Cuza University of Iasi, Iasi, Romania

    Dumitru Luca

  2. Faculty of Physics, Iasi Plasma Advanced Research Center, Alexandru Ioan Cuza University of Iasi, Iasi, Romania

    Lucel Sirghi

  3. Faculty of Physics, Iasi Plasma Advanced Research Center, Alexandru Ioan Cuza University of Iasi, Iasi, Romania

    Claudiu Costin

Rights and permissions

Reprints and permissions

Copyright information

© 2018 Springer International Publishing AG

About this paper

Cite this paper

Kovalenko, D. et al. (2018). Development of Functional Coatings by Electron-Beam Sputtering of Sol-Gel Targets. In: Luca, D., Sirghi, L., Costin, C. (eds) Recent Advances in Technology Research and Education. INTER-ACADEMIA 2017. Advances in Intelligent Systems and Computing, vol 660. Springer, Cham. https://doi.org/10.1007/978-3-319-67459-9_9

Download citation

  • DOI: https://doi.org/10.1007/978-3-319-67459-9_9

  • Published:

  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-67458-2

  • Online ISBN: 978-3-319-67459-9

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics

Search

Navigation