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Biomechanical Microsystems pp 7–69Cite as

Development of Microsystems Multi Physics Investigation Methods

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Part of the book series: Lecture Notes in Computational Vision and Biomechanics ((LNCVB,volume 24))

Abstract

The theoretical and experimental methods for the investigation of microsystems multi physic processes are presented. The FEM method for the analysis of MEMS in digital environment in combination with experimental data from holographic interferometry is developed. Numerical–experimental method for evaluation of geometrical parameters and their usage for characterization of microstructures is presented. In order to optimise hot imprint method in polycarbonate, an elasto-plastic material model for simulation of microstructures hot imprint method is developed.

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Authors and Affiliations

  1. Institute of Mechatronics, Kaunas University of Technology, Kaunas, Lithuania

    Vytautas Ostasevicius & Vytautas Jurenas

  2. Faculty of Mechanical Engineering and Design, Kaunas University of Technology, Kaunas, Lithuania

    Giedrius Janusas, Arvydas Palevicius & Rimvydas Gaidys

Authors
  1. Vytautas Ostasevicius
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  2. Giedrius Janusas
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  3. Arvydas Palevicius
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  4. Rimvydas Gaidys
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  5. Vytautas Jurenas
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Correspondence to Vytautas Ostasevicius .

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Ostasevicius, V., Janusas, G., Palevicius, A., Gaidys, R., Jurenas, V. (2017). Development of Microsystems Multi Physics Investigation Methods. In: Biomechanical Microsystems . Lecture Notes in Computational Vision and Biomechanics, vol 24. Springer, Cham. https://doi.org/10.1007/978-3-319-54849-4_2

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  • DOI: https://doi.org/10.1007/978-3-319-54849-4_2

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-54848-7

  • Online ISBN: 978-3-319-54849-4

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