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Outlook and Challenges of Nano Devices, Sensors, and MEMS pp 459–482Cite as

Micro/Nanoscale Optical Devices for Hyperspectral Imaging System

Abstract

Hyperspectral imaging (HSI) technique has successfully combined 2D images and spectral analysis for sensing and inspection functions and thus has a wide range of perspective applications. However, traditional HSI system using stand-alone dispersive optics or filters features with complex system structure, large devices and high cost. With development of microfabrication technology and materials, currently, compact microspectrometer integrated with spectral modulating optics and photodetectors have shown great potential in providing fast, reliable, robust and high performance hyperspectral imaging and spectroscopy system, which has drawn great attention in both academic researches and industry. Therefore, current research status of such devices are reviewed in this chapter in terms of novel structure design, fabrication techniques applied.

Keywords

  • Hyperspectral Imaging
  • Optical Performance
  • Electrostatic Actuator
  • Reflective Layer
  • Filter Array

These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Authors and Affiliations

  1. Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China

    Li Li, Chengjun Huang & Haiying Zhang

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  1. Li Li
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  2. Chengjun Huang
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  3. Haiying Zhang
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Correspondence to Chengjun Huang .

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Editors and Affiliations

  1. State Key Lab of Electronic Thin Film & Integrated Device, University of Electronic Science & Technology of China, Chengdu, China

    Ting Li

  2. Microelectronics & Solid-state Electronics College, University of Electronic Science & Technology of China, Chengdu, China

    Ziv Liu

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Li, L., Huang, C., Zhang, H. (2017). Micro/Nanoscale Optical Devices for Hyperspectral Imaging System. In: Li, T., Liu, Z. (eds) Outlook and Challenges of Nano Devices, Sensors, and MEMS. Springer, Cham. https://doi.org/10.1007/978-3-319-50824-5_16

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